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Integrated Ferroelectrics
An International Journal
Volume 112, 2010 - Issue 1
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Original Articles

STRUCTURAL AND ELECTRICAL PROPERTIES OF INDIUM DOPED ZNO THIN FILM ON 6H-SIC SUBSTRATE BY RF MAGNETRON SPUTTERING

DONG Hun KIM Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA; Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
,
NAM Gyu CHO Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
,
HO-GI KIM Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
&
WON-JAE LEE Department of Nano Engineering, Dong-Eui University, Busan, Republic of Korea
Pages 79-87 | Received 27 Sep 2009, Accepted 09 Jan 2010, Published online: 05 Nov 2010

REFERENCES

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