Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 121, 2010 - Issue 1
181
Views
19
CrossRef citations to date
0
Altmetric
Original Articles

Nanosized High κ Dielectric Material for FINFET

, &
Pages 31-35 | Received 13 Dec 2009, Accepted 01 Apr 2010, Published online: 20 Nov 2010

References

  • Lundstrom , Mark. S. and Guo , Jing . 2006 . Nanoscale Transistors: Device Physics, Modelling and simulation . Silicon Moore's Law, Springer , 39
  • Zeitzoff , Peter M. , Hutchby , James A. , Bersuker , Gennadi and Huff , Howard R. 2003 . Integrated Circuit technologies: From Conventional CMOS to Nanoscale era: Nano and Giga Challenges in Microelectronics , Edited by: Greer , Jim , Korkin , Anatoli and Labanowski , Jan . 1 – 25 . Elsevier . eds.
  • http://www.itrs.net/Links/2008ITRS/Home2008.htm
  • de Almeida , R. M. C. and Baumvol , I. J. R. 2003 . Diffusion-reaction modeling of silicon oxide interlayer growth during thermal annealing of high dielectric constant materials on silico . Surf. Sci. Rep. , 49 : 1
  • Balog , M. , Schieber , M. , Michman , M. and Patai . 1977 . The chemical vapour deposition and characterization of ZrO2 films from organometallic compounds . Thin. Solid. Films. , 47 : 109 – 120 .
  • Kralik , Balazs , Chang , Eric C. and Louice , Steven . 1998 . Structural properties and quasiparticle band structure of zirconia . Physical Review B. , 57 ( 12 ) : 7027
  • Abelard , P. and Baumard , J. 1995 . The Electrical Conductivity Of Cubic Stabilized Zirconia . Pure. & Appl. Chem. , 67 (11) : 1891 – 1940 .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.