Effect of Nb Doping on Highly {100}-Textured PZT Films Grown on CSD-Prepared PbTiO₃ Seed Layers

References

• Trolier-McKinstry , S. and Muralt , P. 2004 . Thin film piezoelectrics for MEMS . J. Electroceramics , 12 : 7 – 17 .
   Web of Science ®Google Scholar
• Muralt , P. 2000 . PZT thin films for microsensors and actuators: where do we stand? . IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. , 47 : 903 – 915 .
   PubMed Web of Science ®Google Scholar
• Muralt , P. , Polcawich , R. G. and Trolier-McKinstry , S. 2009 . Piezoelectric thin films for sensors, actuators, and energy harvesting . MRS Bulletin , 34 : 658 – 664 .
   Web of Science ®Google Scholar
• Maeda , R. , Tsaur , J. J. , Lee , S. H. and Ichiki , M. 2004 . Piezoelectric microactuator devices . J. Electroceramics , 12 : 89 – 100 .
   Web of Science ®Google Scholar
• Wang , L. -P. , Wolf , R. A. Jr. , Wang , Y. , Deng , K. K. , Zou , L. , Davis , R. J. and Trolier-McKinstry , S. 2003 . Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers . J. Microelectromech, Syst. , 12 : 433 – 439 .
   Web of Science ®Google Scholar
• Muralt , P. , Kohli , M. , Maeder , T. , Kholkin , A. , Brooks , K. , Setter , N. and Luthier , R. 1995 . Fabrication and characterization of PZT thin-film vibrators for micromotors . Sensors and Actuators A , 48 : 157 – 165 .
   Web of Science ®Google Scholar
• Fujii , E. , Takayama , R. , Nomura , K. , Murata , A. , Hirasawa , T. , Tomozawa , A. , Fujii , S. , Kamada , T. and Torii , H. 2007 . Preparation of (001)-oriented Pb(Zr,Ti)O3 thin films and their piezoelectric applications . IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , 54 : 2431
   PubMed Web of Science ®Google Scholar
• Koch , M. , Harris , N. , Mass , R. , Evans , A. G. R. , White , N. M. and Brunnschweiler , A. 1997 . A novel micropump design with thick-film piezoelectric actuator . Measurement Science and Techn. , 8 : 49 – 57 .
   Web of Science ®Google Scholar
• Cross , S. J. , Tadigadapa , S. , Jackson , T. N. , Trolier-McKinstry , S. and Zhang , Q. Q. 2003 . Lead-zirconate-titanate-based piezoelectric micromachined switch . Appl. Phys. Lett. , 83 : 174 – 176 .
   Web of Science ®Google Scholar
• Bronson , J. R. , Pulskamp , J. S. , Polcawich , R. G. , Kroninger , C. M. and Wetzel , E. D. 2009 . PZT MEMS actuated flapping wings for insect-inspired robotics . Proc. IEEE MEMS , : 1047 – 1050 .
   Google Scholar
• Ledermann , N. , Muralt , P. , Baborowski , J. , Gentil , S. , Mukati , K. , Cantoni , M. , Seifert , A. and Setter , N. 2003 . {100}- textured, piezoelectric Pb(Zrx, Ti1-x)O3 thin films for MEMS: integration, deposition and properties . Sensors and Actuators A , 105 : 162 – 170 .
   Web of Science ®Google Scholar
• Haccart , T. , Cattan , E. , Remiens , D. , Hiboux , S. and Muralt , P. 2000 . Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr, Ti)O3 thin films . Appl. Phys. Lett. , 76 : 3292 – 3294 .
   Web of Science ®Google Scholar
• Haccart , T. , Remiens , D. and Cattan , E. 2003 . Substitution of Nb doping on the structural, microstructural and electrical properties in PZT films . Thin Solid Films , 423 : 235 – 242 .
   Web of Science ®Google Scholar
• Kwok , K. W. , Tsang , R. C. W. , Chan , H. L. W. and Choy , C. L. 2004 . Effect of niobium doping on the piezoelectric properties of sol-gel-derived lead-zirconate-titanate films . J. Appl. Phys. , 95 : 1372 – 1376 .
   Web of Science ®Google Scholar
• Kwok , K. W. , Kwok , K. P. , Tsang , R. C. W. , Chan , H. L. W. and Choy , C. L. 2006 . Preparation and piezoelectric properties of sol-gel-derived Nb-doped PZT films for MEMS applications . Integrated Ferroelectrics , 80 : 155 – 162 .
   Web of Science ®Google Scholar
• Budd , K. D. , Dey , S. K. and Payne , D. A. 1985 . Sol-gel processing of PbTiO3, PbZrO3, PZT, and PLZT thin films . Br. Ceram. Proc. , 36 : 107 – 121 .
   Google Scholar
• Dubois , M.-A. and Muralt , P. 1999 . Measurment of the effective transverse piezoelectric coefficient e 31,f of AlN and Pb(Zrx, Ti1-x)O3 thin films . Sensors and Actuators , 77 : 106 – 112 .
   Web of Science ®Google Scholar
• Jaffe , B. , Cook , W. R. and Jaffe , H. 1971 . Piezoelectric ceramics, Academic New York
   Google Scholar
• Uchino , K. 2000 . Ferroelectric Devices , 160 Marcel Dekker .
   Google Scholar
• Kurchania , R. and Milne , S. J. 2003 . Effect of niobium modifications to PZT (53/47) thin films made by a sol-gel route . J. Sol-gel Science and Technology , 28 : 143 – 150 .
   Google Scholar
• Klissurska , R. D. , Brooks , K. G. , Reaney , I. M. , Pawlaczyk , C. , Kosec , M. and Setter , N. 1995 . Effect of Nb doping on the microstructure of sol-gel-derived PZT thin films . J. Am. Ceram. Soc. , 78 : 1513 – 1520 .
   Web of Science ®Google Scholar
• Souza , E. C. F. , Simoes , A. Z. , Cilense , M. , Longo , E. and Varela , J. A. 2004 . The effect of Nb doping on ferroelectric properties of PZT thin films prepared from polymeric precursors . Mater. Chem. Phys. , 88 : 155 – 159 .
   Web of Science ®Google Scholar
• Gong , W. , Li , J. , Chu , X. , Gui , Z. and Li , L. 2004 . Single-crystal Nb-doped Pb(Zr,Ti)O3 thin films on Nb-doped SrTiO3 wafers with different orientations . Appl. Phys. Lett. , 85 : 3818 – 3820 .
   Google Scholar