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Integrated Ferroelectrics
An International Journal
Volume 133, 2012 - Issue 1
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Session D: Ferroelectrics Experimental

Preparation and Characterization of BaTiO3 Thin Films Using Reactive Sputtering Method with Metal Target

Tsuyoshi Osumi Department of Communications Engineering, National Defense Academy, Yokosuka, 239-8686, Japan
,
Masamichi Nishide Department of Communications Engineering, National Defense Academy, Yokosuka, 239-8686, Japan
,
Hiroshi Funakubo Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Yokohama, 226-8502, Japan
,
Hiromi Shima Department of Communications Engineering, National Defense Academy, Yokosuka, 239-8686, Japan
,
Ken Nishida Department of Communications Engineering, National Defense Academy, Yokosuka, 239-8686, Japan
&
Takashi Yamamoto Department of Communications Engineering, National Defense Academy, Yokosuka, 239-8686, Japan
Pages 42-48 | Received 01 Sep 2011, Published online: 20 Apr 2012

References

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