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Integrated Ferroelectrics
An International Journal
Volume 142, 2013 - Issue 1
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Original Articles

Preparation and Properties of Aluminum-doped ZnO–SiO2 Composite Thin Films

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Pages 16-23 | Received 30 Jun 2012, Accepted 02 Nov 2012, Published online: 30 May 2013

References

  • Gao , X.Y. , Lin , Q.G. , Feng , H.L. , Liu , Y.F. and Lu , J.X. 2009 . Study on the structural, electrical, and optical properties of aluminum-doped zinc oxide films by direct current pulse reactive magnetron sputtering . Thin Solid Films , 517 : 4684 – 4688 .
  • Zhu , X. W. , Li , Y.Q. , Ye , L. , Lu , Y.W. and Xia , Y.B. 2006 . Study on ZnO thin films deposited on sol–gel grown ZnO buffer by RF magnetron sputtering . Vacuum , 81 : 502 – 506 .
  • Minami , T. 2008 . Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications . Thin Solid Films , 516 : 1314 – 1321 .
  • Fernandez , S. and Naranjo , F.B. 2010 . Optimization of aluminum-doped zinc oxide films deposited at low temperature by radio-frequency sputtering on flexible substrates for solar cell applications . Solar Energy Materials &Solar Cells , 94 : 157 – 163 .
  • Sayago , I. , Aleixandre , M. , Ares , L. , Fernandez , M.J. , Santos , J.P. , Gutierrez , J. and Horrillo , M.C. 2005 . The effect of the oxygen concentration and the rf power on the zinc oxide films properties deposited by magnetron sputtering . Applied Surface Science , 245 : 273 – 280 .
  • Ruske , F. , Sittinger , V. , Werner , W. , Szyszka , B. , Van Osten , K. U. , Dietrich , K. and Rix , R. 2005 . Hydrogen doping of DC sputtered ZnO:Al films from novel target material . Surface & Coatings Technology , 200 : 236 – 240 .
  • Jeong , W. J. , Kim , S.K. and Park , G.C. 2006 . Preparation and characteristic of ZnO thin film with high and low resistivity for an application of solar cell . Thin Solid Films , 506–507 : 180 – 183 .
  • Hüpkes , J. H. , Rech , B. , Kluth , O. , Repmann , T. , Zwaygardt , B. , Müller , J. , Drese , R. and Wuttig , M. 2006 . Surface textured MF-sputtered ZnO films for microcrystalline silicon-based thin-film solar cells . Solar Energy Materials & Solar Cells , 90 : 3054 – 3060 .
  • Gu , Y. , Kuskovsky , I.L. , Yin , M. , O’Brien , S. and Neumark , G.F. 2004 . Quantum confinement in ZnO nanorods . Applied Physics Letters , 85 ( 17 ) : 3833 – 3835 .
  • Park , J. H. , Pak , H.K. and Cho , C. 2006 . Deposition-Temperature Effects on AZO Thin Films Prepared by RF Magnetron Sputtering and Their Physical Properties . Journal of the Korean Physical Society , 49 : S584 – S588 .
  • Zhu , D. , Li , K. , Luo , F. and Zhou , W.C. 2009 . Preparation and infrared emissivity of ZnO: Al (AZO) thin films . Applied Surface Science , 255 : 6145 – 6148 .
  • Peng , L. P. , Fang , L. , Yang , X.F. , Ruan , H.B. , Li , Y.J. , Huang , Q.L. and Kong , C.Y. 2009 . Characteristics of ZnO:In thin films prepared by RF magnetron sputtering . Physica E. , 41 : 1819 – 1823 .
  • Bayraktaroglu , B. , Leedy , K. and Bedford , R. 2008 . High temperature stability of postgrowth annealed transparent and conductive ZnOAl films . Applied Physics Letters , 93 : 022104
  • Gao , W. and Li , Z. 2004 . ZnO thin films produced by magnetron sputtering . Ceramics International , 30 : 1155 – 1159 .
  • Chawla , A. K. , Kaur , D. and Chandra , R. 2007 . Structural and optical characterization of ZnO nanocrystalline films deposited by sputtering . Optical Materials , 29 : 995 – 998 .
  • Kang , S. J. and Joung , Y.H. 2007 . Influence of substrate temperature on the optical and piezoelectric properties of ZnO thin films deposited by rf magnetron sputtering . Applied Surface Science , 253 : 7330 – 7335 .
  • Pei , Z. L. , Pei , Z.L. , Sun , C. , Tan , M.H. and Xia , J.Q. 2001 . Optical and electrical properties of direct-current magnetron sputtered ZnO:Al films . Journal of Applied Physics , 90 ( 7 ) : 3432 – 3436 .
  • Li , C. , Furuta , M. , Matsuda , T. , Hiramatsu , T. , Furuta , H. and Hirao , T. 2009 . Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by radio frequency magnetron sputtering . Thin Solid Films , 517 : 3265 – 3268 .
  • Kuo , S. Y. , Liu , K.C. , Lai , F.I. , Yang , J.F. , Chen , W.C. , Hsieh , M. Yang , Lin , H.I. and Lin , W.T. 2010 . Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films . Microelectronics Reliability , 50 : 730 – 733 .
  • Singh , S. , Srinivasa , R.S. and Major , S.S. 2007 . Effect of substrate temperature on the structure and optical properties of ZnO thin films deposited by reactive rf magnetron sputtering . Thin Solid Films , 515 : 8718 – 8722 .
  • Jang , K.S. , Park , H. , Jung , S. , Duy , N. V.Duy , Kim , Y. , Cho , J. , Choi , H. , Kwon , T. , Lee , W. , Gong , D. , Park , S. , Yi , J. , Kim , D. Kim , H. 2010 . Optical and electrical properties of 2 wt.% Al2O3-doped ZnO films and characteristics of Al-doped ZnO thin-film transistors with ultra-thin gate insulators . Thin Solid Films , 518 : 2808 – 2811 .

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