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Integrated Ferroelectrics
An International Journal
Volume 142, 2013 - Issue 1
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Original Articles

Influence of Deposition Temperature and Rate on the Surface Morphology of Sc Thin Film

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Pages 111-118 | Received 23 Jun 2012, Accepted 07 Oct 2012, Published online: 30 May 2013

References

  • Boukhenoufa , A. , Cordier , C. , Pichon , L. and Cretu , B. 2007 . Numerical simulations of conduction and low-frequency noise in polysilicon thin film transistors . Thin Solid Films , 515 : 7556 – 7559 .
  • Qu , Q. W. , Wang , M. , Wang , L. H. and Chai , S. 2002 . A continuous viscosity model for thin film lubrication . Tribology International , 35 : 459 – 465 .
  • Biehl , M. , Ahr , M. , Kinzel , W. and Much , F. 2003 . Kinetic Monte Carlo simulations of hetero-epitaxial growth . Thin Solid Films , 428 : 52 – 56 .
  • Blikstein , P. and Tschiptschin , A. P. 1999 . Monte Carlo Simulation of Grain Growth . Mate.Res. , 2 : 133 – 137 .
  • Wang , L. G. and Clancy , P. 2011 . Kinetic Monte Carlo simulation of the growth of polycrystalline Cu films . Surf. Sci. , 473 : 25 – 38 .
  • Zhang , Q. L. , Zhu , J. L. , Tan , J. Z. , Yu , G. L. , Wu , J. G. , Zhu , J. G. and Xiao , D. Q. 2006 . Monte Carlo simulation of the growth of SrTiO3 thin film with molecular source . Vacuum , 81 : 539 – 544 .
  • Yu , G. L. , Zhu , J. G. , Lu , W. and Xiao , D. Q. 2006 . The algorithm of Monte Carlo growth simulation of PbTiO3 thin film . Mate. Desi. , 27 : 710 – 714 .
  • Bruschi , P. , Nannini , A. and Pieri , F. 2000 . Monte Carlo simulation of polycrystalline thin film deposition . Phys. Rev. B , 63 : 035406
  • Beavis , L. C. , Blewer , R. S. , Guthrie , J. W. , Nowak , E. J. and Perkins , W. G. 1972 . The formation and properties of rare earth and transition metal hydrides , Albequerque , NM : Sandia Laboratories .
  • Wurta , J. L. and Tapp , C. M. 1972 . Secondary electron emission from scandium, erbium, scandium deuterium and erbium deuteride under deuteron bombardment , Albequerque , NM : Sandia Laboratories .
  • Larruquert , J. I. , Aznárez , J. A. , Méndez , J. A. , Malvezzi , A. M. , Poletto , L. and Covini , S. 2004 . Optical properties of scandium films in the far and the extreme ultraviolet . Appl.Opt. , 43 ( 16 ) : 3271 – 3278 .
  • Shubin , A. B. , Shunyaev , K. Y. and Yamshchikov , L. F. 2011 . Thin scandium layer on solid aluminium: Thermodynamic investigation . Defe.Diff.Forum , 312–315 : 211 – 216 .
  • Wu , Q. Y. , Bing , W. Z. , Long , X. G. , Zhou , X. S. , Liu , J. H. and Luo , S. Z. 2012 . Influence of process parameters on the microstructure of scandium films deposited by electron-beam evaporation . Vacuum , 86 : 1347 – 1352 .
  • Guo , X. Y. , Zhong , B. and Brault , P. 1998 . Growth and ripening of two-dimensional palladium islands on Ni (111) surface . Surf. Sci. , 409 : 452 – 457 .
  • Zhang , P. F. , Zheng , X. P. and He , D. Y. 2003 . Kinetic Monte Carlo simulation of thin film growth . Science in China , 46 ( 6 ) : 610 – 618 .

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