A Flowmeter with a Corrugation Structure and 2-Directional Measurement Application

References

• He , J and Song , C CS . (1999) . Evaluation of pedestrian winds in urban area by numerical approach . J Wind Eng Ind Aerodyn , 81 : 295 – 309 .
   Web of Science ®Google Scholar
• Ma , Y , Ma , S , Wang , T and Fang , W . (1995) . Air-flow sensor and humidity sensor application to neonatal infant respiration monitoring . Sens Actuators A. , 49 : 47 – 50 .
   Web of Science ®Google Scholar
• Billat , S , Kliche , K , Gronmaier , R , Nommensen , P , Auber , J , Hedrich , F and Zengerle , R . (2008) . Monolithic integration of micro-channel on disposable flow sensors for medical applications . Sens and Actuators A , : 66 – 74 .
   Web of Science ®Google Scholar
• Roh , S-C , Choi , Y-M and Kim , S-Y . (2006) . Sensitivity enhancement of a silicon micro-machined thermal flow sensor . Sens Actuators A. , 128 : 1 – 6 .
   Web of Science ®Google Scholar
• Berckmans , D , Vandenbroeck , Ph and Goedseeels , V . (1991) . Sensor for continuous measurement of the ventilation rate in livestock buildings . Indoor Air. , 1 : 323 – 336 .
   Google Scholar
• Nguyen , A T and Rediter , S . (2011) . The effect of ceiling configurations on indoor air motion and ventilation flow rates . Build Environ. , 46 : 1211 – 1222 .
   Web of Science ®Google Scholar
• Martin , D P , Grant , J J and Ringwood , J V . (2002) . Evaluation of a prototype thermal anemometer for use in low airspeed drying measure calculations . Flow Meas Instrum. , 12 : 385 – 396 .
   Web of Science ®Google Scholar
• Bottema , M . (1993) . Wind climate and urban geometry . Ph.D. Dissertation, Technische Universitiet Eindhoven, Facultyeit Bouwkunde, Vakgroep Fago
   Google Scholar
• Chiang , H-C , Pan , C-S , Wu , H-S and Yang , B-C . (2007) . Measurement of Flow Characteristics of a Ceiling Fan with Varying Rotational Speed . Proc. Clima 2007 WellBeing Indoors ,
   Google Scholar
• Penwarden , A D . (1973) . Acceptable wind speeds in towns . Build Sci. , 8 : 259 – 267 .
   Google Scholar
• Buchner , R , Sosna , C , Maiwald , M , Benecke , W and Lang , W . (2006) . A high-temperature thermopile fabrication process for thermal flow sensors . Sens Actuators A , : 262 – 266 .
   Web of Science ®Google Scholar
• Hedrich , F , Kliche , K , Storz , M , Billat , S , Ashauer , M and Zengerle , R . (2010) . Thermal flow sensors for MEMS spirometric devices . Sens Actuators A. , 162 : 373 – 378 .
   Web of Science ®Google Scholar
• Zhang , Q , Ruan , W , Wang , H , Zhou , Y , Wang , Z and Liu , L . (2010) . A self-bended piezoresistive microcantilever flow sensor for low flow rate measurement . Sens Actuators A. , 158 : 273 – 279 .
   Web of Science ®Google Scholar
• Wang , Y-H , Lee , C-Y and Chiang , C-M . (2007) . A MEMS-based air flow sensor with a free-standing microcantilever . Sensors. , 7 : 2389 – 2401 .
   PubMed Web of Science ®Google Scholar
• Song , C , Aiyar , A R , Kim , S-H and Allen , M G . (2011) . Exploitation of aeroelastic effects for drift reduction in an all-polymer air flow sensor . Sens Actuators A. , 165 : 66 – 72 .
   Web of Science ®Google Scholar
• Su , Y , Evans , A GR , Brunnschweiler , A and Ensell , G . (2002) . Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing . J Micromech Microeng. , 12 : 780 – 785 .
   Web of Science ®Google Scholar
• Lee , C Y , Wen , C Y , Hou , H H , Yang , R J , Tsai , C H and Fu , L M . (2009) . Design and characterization of MEMS-based flow-rate and flow-direction microsensor . Microfluid Nanofluid , 6 : 363 – 371 .
   Web of Science ®Google Scholar
• Ma , R-H , Lee , C-Y , Wang , Y-H and Chen , H-J . (2008) . Microcantilever-based weather station for temperature, humidity and flow rate measurement . Microsys Technol. , 14 : 971 – 977 .
   Web of Science ®Google Scholar
• Choi , D K and Lee , S H . (2011) . Air flow sensor with corrugation structure for low air velocity detection . J Sens Sci Tech. , 20 : 393 – 399 .
   Google Scholar
• Giovanni , M D . (1982) . Flat and corrugated diaphragm design handbook , New York : Marcel Dekker inc .
   Google Scholar