Preparation of ITO Thin Films by Injection Ultrasound Spray Pyrolysis and its Physical Properties

References

• Jiang , Zi-ran . 2010 . The preparation method and research progress of ITO thin films [J] . Development and Application of Materials. , 25 ( 4 ) : 68 – 71 .
   Google Scholar
• Cheng , Li-shun , Sun , Ben-shuang , Zhong , Jing-ming , He , Li-jun , Wang , Dong-xin and Chen , Huan-ming . 2008 . The Research Progress of ITO transparent conductive films[J] . comprehensive review. , 27 : 10 – 16 .
   Google Scholar
• Diao , Geng-xiu and Chen , Wen-bin . 2004 . Preparation of ITO thin films by sol-gel method. , 24 ( 4 ) : 249 – 253 .
   Google Scholar
• Sun , Li-da . 2009 . The Research of powder process of nano-ITO, D , 1 – 7 . Yunnan : Kunming university of science and technology .
   Google Scholar
• Zhang , Shu-gao , Huang , Bo-yun and Fang , Xun-hua . 1997 . The application and the preparation method of the ITO thin films[J] . Power materials science and engineering. , 2 ( 1 ) : 28 – 31 .
   Google Scholar
• Yutaka , S , Chikako , K Shigeyuki , S . 2002 . Highly-conducting Indium-tin-oxide Transparent Films Fabricated by Sp ray CVD Using Ethanol Solution of Indium (III) Chloride and Tin (II) Chloride[J] . Thin Solid Films , 409 : 46
   Web of Science ®Google Scholar
• George , J and Menon , C S . 2000 . Electrical and Op tical Properties of Electron Beam Evaporated ITO Thin Films[J] . Surface and Coatings Technology , 132 : 45
   Web of Science ®Google Scholar
• Yeom , H Y , Popovich , N Chason , E . 2002 . A Study of the Effect of Process Oxygen on Stress Evolution in d. c. Magnetron-deposited Tin-doped Indium Oxide[J] . Thin Solid Films , 411 : 17
   Web of Science ®Google Scholar
• Alam , M J and Cameron , D C . 2000 . Op tical and Electrical Properties of Transparent Conductive ITO Thin FilmsDeposited by Sol-gel Process[J] . Thin Solid Films , 3772378 : 455
   Web of Science ®Google Scholar
• Adurodija , F O , Izumi , H Ishihara , T . 2000 . Low-temperature Growth of Low2resistivity Indium-tin-oxide Thin Films by Pulsed LaserDeposition[J] . Vacuum. , 59 : 641
   Web of Science ®Google Scholar