Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 173, 2016 - Issue 1: Proceedings of the International Conference on Functional Materials and Nanotechnologies (FM&NT-2015)
Submit an article Journal homepage
136
Views
1
CrossRef citations to date
0
Altmetric
Original Articles

Tunable and switchable bulk acoustic resonator with graded BST composition

T. S. KalkurMicroelectronics Research Laboratories, Department of Electrical and Computer Engineering, University of Colorado, Colorado Springs, CO, USACorrespondence[email protected]
,
Almonir MansourMicroelectronics Research Laboratories, Department of Electrical and Computer Engineering, University of Colorado, Colorado Springs, CO, USA
,
Milad HmedaMicroelectronics Research Laboratories, Department of Electrical and Computer Engineering, University of Colorado, Colorado Springs, CO, USA
,
Pamir AlpayDepartment of Material Science and Engineering, University of Connecticut, CT, USA
,
N. SbrockeyStructured Materials Industries, Piscataway, NJ, USA
&
G. S. TompaStructured Materials Industries, Piscataway, NJ, USA
Pages 113-118 | Received 05 Oct 2015, Accepted 12 Feb 2016, Published online: 17 Jun 2016

References

  • H. Kassaf, N. Khakpash, F. Sun, N. M. Sbrockey, G. S. Tompa, T. S. Kalkur, and S. P. Alpay. Strain Engineered Barium Strontium Titanate for Tunable Thin Film Resonators. Applied Physics Letter 104, 202902–1202902-5 ( 2014).
  • G. Subramanyam, M. Cole, N. Sun, N. Sbrockey, G. S. Tompa, and T. S. Kalkur. Challenges and opportunities for multi-functional oxide thin films for voltage tunable radio frequency/microwave components. Journal of Applied Physics 114, 191301-1–191301-35 ( 2013).
  • N. M. Cole, E. Ngo, S. Hirsch, J. D. Demaree, S. Zhong, and S. P. Alpay. The fabrication and material properties of compositionally multilayered Ba1-x SrxTiO3 thin films for realization of temperature insensitive tunable phase shifter devices. Journal of Appl. Phys. 102, 034104 ( 2007).
  • M. E. Naggar, K. Dayal, D. G. Goodwin, and K. Bhattacharya. Graded Ferroelectric Capacitors with Robust Temperature Characteristics. Journal of Appl. Phys. 100, 114115-1–114115-5 ( 2006).
  • S. Zhong, Z. G. Ban, S. P. Alpay, and J. V. Mantese. Large Piezoelectric Strains from Polarization Graded Ferroelectrics. Appl. Phys. Lett. 89, 142913 ( 2006).
  • A. Noeth, T. Yamada, P. Muralt, A. K. Tagantsev, and N. Setter. Tunable Thin Film Bulk Acoustic Wave Resonator Based on BaxSr1-xTiO3 Thin Film. IEEE Trans. on Ultra. Ferro. and Freq. Control 57. 2, 379–385 ( 2010).
  • N. M. Sbrockey, G. S. Tompa, T. S. Kalkur, J. Zhang, S. P. Alpay, and M. W. Cole. Voltage induced acoustic resonance in metal organic chemical vapor deposition SrTiO3 thin film. Journal of Vac. Sci. and Tech. 30, 061202 ( 2012).
  • J. Berge, M. Norling, A. Vorobiev and S. Gevorgian. Field and temperature dependent parameters of the dc field induced resonances in BaxSr1-xTiO3-based tunable thin film bulk acoustic resonators. J. Appl. Phys. 103, 064508 ( 2008).
  • A. Vorobiev, and S. Gevorgian. Intrinsically switchable Thin Film bulk acoustic resonators. Appl. Phys. Lett. 104, 222905 ( 2014).

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.