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Integrated Ferroelectrics
An International Journal
Volume 180, 2017 - Issue 1: Proceedings of the Fifteenth China International Nanoscience and Technology Symposium (CINSTS16), Part III
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Original Articles

The relationship between substrate temperature and mechanical properties of CrN/Si3N4 nanolayered coatings deposited by magnetron sputtering

Xiaoming BaiBasic Flight Training Base, Air Force Aviation University, Changchun, ChinaCorrespondence[email protected]
,
Wanfeng LinBasic Flight Training Base, Air Force Aviation University, Changchun, China
,
Mingxiao WangBasic Flight Training Base, Air Force Aviation University, Changchun, China
&
Xinying ZhangBasic Flight Training Base, Air Force Aviation University, Changchun, China
Pages 61-68 | Received 18 Sep 2016, Accepted 07 Mar 2017, Published online: 29 Sep 2017

References

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