Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 182, 2017 - Issue 1: Proceedings of the Fifteenth China International Nanoscience and Technology Symposium (CINSTS16), Part V
Submit an article Journal homepage
104
Views
1
CrossRef citations to date
0
Altmetric
Original Articles

Effects of nano mechanical properties on LiNbO3 fixed abrasive lapping

Nannan ZhuJiangsu Province Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, ChinaCorrespondence[email protected] [email protected]
,
Shengbin ZhangJiangsu Province Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, China
,
Yongwei ZhuJiangsu Province Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, ChinaCorrespondence[email protected] [email protected]
,
Shunzhi LingJiangsu Province Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, China
,
Zikun WangJiangsu Province Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, China
&
Jun LiJiangsu Province Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, China
Pages 119-126 | Received 20 Oct 2016, Accepted 07 Mar 2017, Published online: 02 Nov 2017

References

  • H. Kim, H. Kim, and H. Jeong, Self-conditioning of encapsulated abrasive pad in chemical mechanical polishing. Journal of Materials Processing Technology. 142, 614–618 (2003).
  • H. Kim, B. Park, and S. Lee, Self-conditioning fixed abrasive pad in CMP. Journal of the Electrochem Society. 15(12), 858–862 (2004).
  • Y. F. Kong, Multi-function photoelectric materials——Lithium niobate. Beijing: Science Press; (2005).
  • W. Zhang, and J. Q. Zhu, Experimental Investigation on Surface Subsurface Damage of Nd-Doped Phosphate Glass. Acta Optica Sinica. 02, 268–272 (2008).
  • Z. Wang, Y. L. Wu, and Y. F. Dai, Rapid detection of subsurface damage of optical materials in lapping process and its influence regularity. Optics and Precision Engineering. 01, 16–21 (2008).
  • V. V. Atuchin, V. G. Kesler, and I. A. Lisova, Structure and chemical composition of LiB3O5 surfaces. Crystal Research and Technology. 38(10), 896–902 (2003).
  • Z. Y. Zhang, Y. W. Meng, and D. M. Guo, Material removal mechanism of precision grinding of soft-brittle CdZnTe wafers. The International Journal of Advanced Manufacturing Technology. 46(5–8), 563–569 (2010).
  • Z. L. Ju, Y. W. Zhu, and J. B. Wang, Effect of slurries on chemical mechanical polishing of decorative glasses by fixed-abrasive pad. Optics and Precision Engineering. 21(4), 955–962 (2013).
  • H. Kim, R. Manivannan, and D. J. Moon, Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates. Wear. 302(1–2), 1340–1344 (2012).
  • Y. L. Sun, Basic Research on CMP of silicon wafer with ice fixed abrasives. Nanjing University of Aeronautics and Astronautics. China. 07 (2008).
  • T. G. Bifano, T. A. Dow, and R. O. Scattergood, Ductile-regime grinding: a new technology for machining brittle material. Journal of Manufacturing Science and Engineering. 113(2), 184–189 (1991).
  • X. X. Tang, Y. W. Zhu, and C. Wang, Realization of Self-conditioning Process of Hydrophilic Fixed Abrasive Pad. Nanotechnology and Precision Engineering. 12(1), 68–73 (2014).
  • F. George, Metallography, principles and practice. New York. (1984).
  • J. L. Yuan, Ultra-precision machining technology of functional ceramics. China. (2000).

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.