References
- J. F. Scott, and C. A. Araujo, Ferroelectric memories. Science. 246(4936), 1400–05 (1989).
- H. Kueppers, T. Leuerer, U. Schnakenberg, W. Mokwa, M. Hoffmann, and T. Schneller, PZT thin films for piezoelectric microactuator applications., Sens Actuators A. 97–98, 680–684 (2002).
- H. M. Liu, Q. L. Zhao, M. S. Cao, J. Yuan, Z. X. Duan, and C. J. Qiu. Electromechanical properties of mcirocantilever actuated by enhanced piezoelectric PZT thick film., Chin Phys Lett. 25(11), 4128–30 (2008).
- K. R. Udayakumar, and A. M. Flynn, Piezoelectric thin film ultrasonic micromotors., Mater Desig. 13(2), 93 (1992).
- S. K. Kim, and Y. H. Seo, Fabrication and characterization of the piezoelectric microtransformer based on microelectromechanical systems., Appl Phys Lett. 88, 263510 (2006).
- Z. G. Zhou, and B. Wang, Non-local theory solution for an anti-plane shear permeable crack in functionally graded piezoelectric materials., Appl Compos Mater. 13(6), 345–67 (2006).
- X. Y. Wang, C. Y. Lee, C. J. Peng, P. Y. Chen, and P. Z. Chang, A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method. Sens Actuators A. 143, 469–74 (2008).
- C. L. Zhao, Z. H. Wang, W. G. Zhu, O. Tan, and H. Hng, Microstructure and properties of PZT53/47 thick films derived from sols with submicron-sized PZT particle. Ceram Inter. 30, 1925–27 (2004).
- S., Palmas, F., Ferrara, A, Pisu, and C., Cannas, Oxygen evolution on Ti/Co3O4-coated electrodes in alkaline solution. Chemical papers. 61(2), 77–82 (2007).
- Z. X. Duan, J. Yuan, Q. L. Zhao, H. M. Liu, H. B. Lin, and W. T. Zhang, Preparation and ferroelectric properties of double-dimension PZT composite piezoelectric thick Film., Chin Phys Lett. 25, 1472–75 (2008).
- Q. L. Zhao, M. S. Cao, J. Yuan, W. L. Song, R. Lu, D. W. Wang, and D. Q. Zhang, Preparation and electrical properties of Pb(Zr0.52Ti0.48)O3 thick films embedded with ZnO nanowhiskers by a hybrid sol-gel route., Journal of Alloys and Compounds. 492 (1–2), 264–268 (2010).
- B. P. Zhu, D. W. Wu, Q. F. Zhou, J. Shi, and K. K. Shung, Lead zirconate titanate thick film with enhanced electrical properties for high frequency transducer applications., Appl Phys Lett. 93, 012905 (2008).