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Articles

Design and analysis of MEMS piezoresistive rectangular paddle microcantilever based wind speed sensor

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Pages 43-58 | Received 10 Dec 2017, Accepted 16 Jul 2018, Published online: 27 Mar 2019

References

  • L. Du, Z. Zhao, and C. Pang. Design and Fabrication MEMS-Based Micro Solid State cantilever Wind Speed Sensor, Proceedings of the 2007 International Conference on Information Acquisition July 9–11, 2007, 336.
  • Z. Fan, et al., Design and fabrication of artificial lateral line flow sensors. J. Micromech. Microeng. 12 (5), 655 (2002).
  • N. T. Nguyen. Micromachined flow sensors—A review. Flow Measur Instrument. 8 (1), 7 (1997).
  • L. Qiu, et al., A Micro gas-flow sensor with integrated heat sink and flow guide. Sensors Actuators A. 54 (1–3), 547 (1996).
  • T. Neda, K. Nakmura, and T. Takumi. A polysilicon flow sensor for gas flow meters. Sensors Actuators A. 54 (1–3), 626 (1996).
  • F. Mailly, et al., An Anemometer with hot platinum thin film. Sensors Actuators A. 94 (1–2), 32 (2001).
  • S. Kim, T. Nam, and S. Park. Measurement of flow direction and velocity using a micromachined flow sensor. Sensors Actuators A. 114 (2–3), 312 (2004).
  • Y. Su, et al., Characterization of a highly sensitive ultrathin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing. J. Micromech. Microeng. 12 (6), 780 (2002).
  • Y. Wang, C. Lee, and C. Chiang. A MEMS-based air flow sensor with a free-standing microcantilever structure. Sensors. 7 (10), 2389 (2007).
  • L. Du, et al., Micro solid state silicon plate wind velocity sensor. In 'NEMS' (2009), IEEE, Shenzhen, China, pp. 1–4.
  • N. Svedin, E. Stemme, and G. Stemme. A static turbine flow meter with a micromachined silicon torque sensor. J. Microelectromech. Syst. 12 (6), 937 (2003).
  • Z. Songsong, et al., Characterization of a silicon nanowire-based cantilever air-flow sensor. J. Micromech. Microeng. 22 (9), 095008 (2012).
  • Y. Seo, and B. Kim. A self-resonant micro flow velocity sensor based on a resonant frequency shift by flow-induced vibration. J. Micromech. Microeng. 20 (7), 075024 (2010).
  • B. R. Munson, D. F. Young, and H. Theodore, Fundamentals of Fluid Mechanics (John Wiley and Sons, Inc, Hoboken, NJ, 3 ed. 1998).
  • J. Brugger, et al., Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry. Sensors Actuators A. 73 (3), 235 (1999).
  • T. Thundat, et al., Vapor detection using resonating microcantilever, Anal. Chem. 67 (3), 519 (1995).
  • K. Vashist. A review of microcantilever for sensing applications. J Nanotechnol. Online 3, 1–15 (2007).
  • M. Madou. Fundamentals of Microfabrication: the Science of Miniaturization, 2nd ed., (CRC Press, Boca Raton, FL 2002).
  • K. Kazumi. Steady-state and transient performance analysis of permanent-magnet machines using time-stepping finite element technique, finite element analysis - new trends and developments, InTech, 2012. DOI: 10.5772/48426
  • A. R. Rosmazuin, B. Badariah, and Y. M. Burhanuddin. Design and analysis of MEMS Piezoresistive SiO2 cantilever-based sensor with stress concentration region for biosensing applications. ICSE Proceeding, Johor Bahru, Malaysia, 2008.
  • V. Chivukula, et al., Simulation of SiO2 based piezoresistive microcantilevers. Sensors Actuators A. 125 (2), 526 (2006).
  • X. Yu, et al., Design of high-sensitivity cantilever and its monolithic integration with CMOS Circuits. IEEE Sensor J. 7, 489 (2007).
  • M. A. Bhatti, et al., Design and finite element analysis of Piezoresistive Cantilever with stress concentration holes, 2nd IEEE Conference on Industrial Electronics and Applications, 2007.
  • J. H. He, and Y. F. Li. High sensitivity piezoresistive cantilever sensor for biomolecular detection. J. Phys: Conf. Ser. 34, 429 (2006).

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