Effects of Substrate Bias on the Diamond Nanostructure by Reactive Ion Etching

References

• Z. Xu et al., Structure transition mechanism of single-crystalline silicon, g-C3N4, and diamond nanocone arrays synthesized by plasma sputtering reaction deposition, J. Phys. Chem. C 119 (52), 29062 (2015). DOI: 10.1021/acs.jpcc.5b10952.
   Web of Science ®Google Scholar
• P. Sun et al., Controlled fabrication of periodically high-aspect ratio CVD-diamond nanopillar arrays by pure oxygen etching process, Microelectron. Eng. 155, 61 (2016). DOI: 10.1016/j.mee.2016.02.031.
   Web of Science ®Google Scholar
• H. Motahari and R. Malekfar, Bottom-up diamond nanorod growth in HFCVD from nanocrystalline diamond film as a template-free method, Mater. Res. Express. 4 (7), 075030 (2017). DOI: 10.1088/2053-1591/aa7656.
   Web of Science ®Google Scholar
• Y. Yang et al., Fabrication of arrays of high-aspect-ratio diamond nanoneedles via maskless ECR-assisted microwave plasma etching, CrystEngComm 17 (14), 2791 (2015). DOI: 10.1039/C4CE02267J.
   Web of Science ®Google Scholar
• H. Khan et al., Fabrication, structural evaluation, optical and photoelectrochemical properties of soft lithography based 1D/2D surface patterned indium titanium oxide sol-gel thin film, Surf. Coat. Technol. 328, 410 (2017). DOI: 10.1016/j.surfcoat.2017.09.007.
   Web of Science ®Google Scholar
• T. Hao et al., Low turn-on field nanodiamond conic field emitter, Diam. Relat. Mater. 75, 91 (2017). DOI: 10.1016/j.diamond.2017.02.010.
   Web of Science ®Google Scholar
• Y. S. Zou et al., Surface nanostructuring of boron-doped diamond films and their electrochemical performance, J. Nanosci. Nanotech. 11 (9), 7914 (2011). DOI: 10.1166/jnn.2011.4742.
   PubMed Web of Science ®Google Scholar
• E. Y. W. Chong et al., A diamond nanocone array for improved osteoblastic differentiation, J. Mater. Chem. B. 1 (27), 3390 (2013). DOI: 10.1039/c3tb20114g.
   PubMed Web of Science ®Google Scholar
• R. Tu et al., Morphology and mechanical behavior of diamond films fabricated by IH-MPCVD, RSC Adv. 8 (29), 16061 (2018). DOI: 10.1039/C8RA01871E.
   Web of Science ®Google Scholar
• M. Hou et al., Novel surface treatment strategy to improve the binding strength for diamond film on Ti substrate, Arab. J. Sci. Eng. 43 (1), 263 (2018). DOI: 10.1007/s13369-017-2851-1.
   Web of Science ®Google Scholar
• Y. Yanning et al., Hydrogen treatment technology of Ti-based nano-diamond field emission cathode, Rare Metal. Mat. Eng. 46 (11), 3208 (2017). DOI: 10.1016/S1875-5372(18)30030-4.
   Web of Science ®Google Scholar
• C. Z. Gu et al., Unique electrical properties of nanostructured diamond cones, Chin. Phys. B 22 (9), 098107 (2013). DOI: 10.1088/1674-1056/22/9/098107.
   Web of Science ®Google Scholar
• M. Sobaszek et al., Optical and electrical properties of ultrathin transparent nanocrystalline boron-doped diamond electrodes, Opt. Mater. 42, 24 (2015). DOI: 10.1016/j.optmat.2014.12.014.
   Web of Science ®Google Scholar
• K. Panda et al., Direct observation and mechanism for enhanced electron emission in hydrogen plasma-treated diamond nanowire films, ACS Appl. Mater. Interfaces 6 (11), 8531 (2014). DOI: 10.1021/am501398s.
   PubMed Web of Science ®Google Scholar
• H. Xu et al., An efficient titanium-containing corundum wheel for grinding CVD diamond films, Diam. Relat. Mater. 84, 119 (2018). : DOI: 10.1016/j.diamond.2018.03.018.
   Web of Science ®Google Scholar
• C. Arend et al., Site selective growth of heteroepitaxial diamond nanoislands containing single SiV centers, Appl. Phys. Lett. 108 (6), 063111 (2016). DOI: 10.1063/1.4941804.
   Web of Science ®Google Scholar
• J. M. Wheeler et al., Approaching the limits of strength: measuring the uniaxial compressive strength of diamond at small scales, Nano Lett. 16 (1), 812 (2016). DOI: 10.1021/acs.nanolett.5b04989.
   PubMed Web of Science ®Google Scholar
• C. L. Chao et al., Study on fabricating of micro-pyramid array by precision diamond turning, Int. Conf. Opt. Precision Eng. Nanotechnol. Int. Soc. Opt. Photon. 8769, 87691C (2013). DOI: 10.1117/12.2021119.
   Google Scholar
• R. Ramaneti et al., Vertically aligned diamond-graphite hybrid nanorod arrays with superior field electron emission properties, APL Mater. 5 (6), 066102 (2017). DOI: 10.1063/1.4985107.
   Web of Science ®Google Scholar
• B. He et al., Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics, Nano Today 8 (3), 265 (2013). DOI: 10.1016/j.nantod.2013.04.008.
   Web of Science ®Google Scholar
• Y. S. Zou et al., Fabrication of diamond nanocones and nanowhiskers by bias-assisted plasma etching, Diam. Relat. Mater. 16 (4-7), 1208 (2007). DOI: 10.1016/j.diamond.2006.11.036.
   Web of Science ®Google Scholar
• S. J. Askari, Development of CVD diamond thin films on titanium substrate and study their tribological behavior, Adv. Mater. Res. 399-401, 1994 (2011). DOI: 10.4028/www.scientific.net/AMR.399-401.1994.
   Google Scholar
• P. Strąkowska et al., Electrochemically assisted deposition of hydroxyapatite on Ti6Al4V substrates covered by CVD diamond films—Coating characterization and first cell biological results, Mater. Sci. Eng. C 59, 624 (2016). DOI: 10.1016/j.msec.2015.10.063.
   PubMed Web of Science ®Google Scholar
• X. R. Lu et al., Investigation on microstructure evolution and failure mechanism of boron doped diamond coated titanium electrode during accelerated life test, Thin Solid Films 660, 306 (2018). DOI: 10.1016/j.tsf.2018.06.039.
   Web of Science ®Google Scholar
• F. L. Migliorini et al., Efficiency study and mechanistic aspects in the Brilliant Green dye degradation using BDD/Ti electrodes, Diam. Relat. Mater. 65, 5 (2016). DOI: 10.1016/j.diamond.2015.12.013.
   Web of Science ®Google Scholar
• T. S. Yang et al., Growth of faceted, ballas-like and nanocrystalline diamond films deposited in CH4/H2/Ar MPCVD, Diam. Relat. Mater. 10 (12), 2161 (2001). DOI: 10.1016/S0925-9635(01)00495-2.
   Web of Science ®Google Scholar
• D. M. Gruen, Nanocrystalline diamond films, Annu. Rev. Mater. Sci. 29 (1), 211 (1999). DOI: 10.1146/annurev.matsci.29.1.211.
   Google Scholar
• J. Zhang et al., Effect of deposition parameters on micro-and nano-crystalline diamond films growth on WC–Co substrates by HFCVD, Trans. Nonferr. Metal Soc. 24 (10), 3181 (2014). DOI: 10.1016/S1003-6326(14)63458-0.
   Web of Science ®Google Scholar
• P. K. Chu, and L. Li, Characterization of amorphous and nanocrystalline carbon films, Mater. Chem. Phys. 96 (2-3), 253 (2006). DOI: 10.1016/j.matchemphys.2005.07.048.
   Web of Science ®Google Scholar
• R. Pfeiffer et al., Evidence for trans-polyacetylene in nano-crystalline diamond films, Diam. Relat. Mater. 12 (3-7), 268 (2003). DOI: 10.1016/S0925-9635(02)00336-9.
   Web of Science ®Google Scholar
• N. A. Braga et al., From micro to nanocrystalline transition in the diamond formation on porous pure titanium, Diam. Relat. Mater. 17 (11), 1891 (2008). DOI: 10.1016/j.diamond.2008.04.002.
   Web of Science ®Google Scholar
• G. Cicala et al., Nucleation, growth and characterization of nanocrystalline diamond films, Diam. Relat. Mater. 14 (3-7), 421 (2005). DOI: 10.1016/j.diamond.2004.12.025.
   Web of Science ®Google Scholar
• S. J. Askari et al., Adherent and low friction nano-crystalline diamond film grown on titanium using microwave CVD plasma, Diam. Relat. Mater. 17 (3), 294 (2008). DOI: 10.1016/j.diamond.2007.12.045.
   Web of Science ®Google Scholar