References
- M.-A. Dubois et al., Which PZT thin films for piezoelectric microactuator applications?, Integr. Ferroelectr. 22 (1-4), 535 (1998). DOI: https://doi.org/10.1080/10584589808208072.
- B. Piekarski et al., Sol-gel PZT for MEMS applications, Integr. Ferroelectr. 42 (1), 25 (2002). DOI: https://doi.org/10.1080/10584580210868.
- R. G. Polcawich et al., Design and fabrication of a lead zirconate titanate (PZT) thin film acoustic sensor, Integr. Ferroelectr. 54 (1), 595 (2003). DOI: https://doi.org/10.1080/10584580390259010.
- J. Shao et al., AlN based piezoelectric micromirror, Opt. Lett. 43 (5), 987 (2018). DOI: https://doi.org/10.1364/OL.43.000987.
- K. Meinel et al., Piezoelectric scanning micromirror with large scan angle based on thin film aluminum nitride, in Proceedings of the Transducers 2019 – Eurosensors XXXIII, June, 2019 Berlin, pp. 1518–1521.
- K. Tsubouchi, and N. Mikoshiba, Zero-temperature-coefficient SAW devices on AlN epitaxial films, IEEE Trans. Son. Ultrason. 32 (5), 634 (1985). DOI: https://doi.org/10.1109/T-SU.1985.31647.
- S. Trolier-McKinstry, and P. Muralt, Thin film piezoelectrics for MEMS, J. Electroceram. 12 (1/2), 7 (2004). DOI: https://doi.org/10.1023/B:JECR.0000033998.72845.51.
- C. Zuo et al., Multi-frequency pierce oscillators based on piezoelectric AlN contour-mode MEMS resonators, in Proceedings of the 2008 IEEE International Frequency Control Symposium, May, 2008 Honolulu, pp. 402–407. DOI: https://doi.org/10.1109/FREQ.2008.4623028.
- T. Kawabata et al., The 2-dimensional micro scanner integrated with PZT thin film actuator, in Proceedings of the Transducers 1997, June, 1997 Chicago, pp. 339–342.
- Y. Yasuda et al., Piezoelectric 2d-optical micro scanners with PZT thick films, Integr. Ferroelectr. 80 (1), 341 (2006). DOI: https://doi.org/10.1080/10584580600660140.
- K. H. Koh, T. Kobayashi, and C. Lee, Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications, Sens. Actuat. A: Phys. 184, 149 (2012). DOI: https://doi.org/10.1016/j.sna.2012.06.018.
- W. Liu et al., A tip–tilt–piston micromirror with a double S-shaped unimorph piezoelectric actuator, Sens. Actuat. A: Phys. 193, 121 (2013). DOI: https://doi.org/10.1016/j.sna.2012.12.038.
- H. Oikawa et al., Deposition and characterization of amorphous aluminum nitride thin films for a gate insulator, Thin Solid Films 574, 110 (2015). DOI: https://doi.org/10.1016/j.tsf.2014.11.081.
- A. Iqbal, and F. Mohd-Yasin, Reactive sputtering of aluminum nitride (002) thin films for piezoelectric applications: a review, Sensors 18 (6), 1797 (2018). DOI: https://doi.org/10.3390/s18061797.
- J. Wang, G. Zhang, and Z. You, Design rules for dense and rapid Lissajous scanning, Microsyst. Nanoeng. 6, 101 (2020). DOI: https://doi.org/10.1038/s41378-020-00211-4.