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Integrated Ferroelectrics
An International Journal
Volume 10, 1995 - Issue 1-4
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Materials processing—PVD

Liquid source misted chemical deposition (LSMCD)–a critical review

Maria Huffman Symetrix Corp., Colorado Springs, CO, 80918
Pages 39-53 | Received 29 Mar 1995, Published online: 19 Aug 2006

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