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Integrated Ferroelectrics
An International Journal
Volume 10, 1995 - Issue 1-4
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Characterization and testing

Effect of RuOx bottom electrode annealing temperature on sol-gel derived PZT capacitors

C. J. Rawn Department of Materials Science and Engineering, University of Arizona, Tucson, Arizona, 85721, USA
,
M. N. Orr Department of Materials Science and Engineering, University of Arizona, Tucson, Arizona, 85721, USA
,
R. N. Vogt Department of Materials Science and Engineering, University of Arizona, Tucson, Arizona, 85721, USA
,
D. P. Birnie Iii Department of Materials Science and Engineering, University of Arizona, Tucson, Arizona, 85721, USA
&
R. D. Schrimpf Department of Electrical and Computer Engineering, University of Arizona, Tucson, Arizona, 85721, USA
Pages 309-318 | Received 22 Mar 1995, Published online: 19 Aug 2006

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