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Integrated Ferroelectrics
An International Journal
Volume 12, 1996 - Issue 2-4
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Session II: Thin films

Growth and microstructures of sputtered ferroelectric PbTiO3 thin films

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Pages 93-103 | Received 27 May 1996, Published online: 19 Aug 2006

References

  • Wasa , K. , Satoh , T. , Tabata , K. , Adachi , H. , Yabuuchi , Y. and Setsune , K. 1994 . J. Mater. Res. , 9 : 2959
  • Wasa , K. 1993 . Mater. Sci. India , 16 : 643
  • Wasa , K. , Satoh , T. , Tabata , K. , Adachi , H. and Setsune , K. 1994 . Appl. Phys. Commun. , 13 : 205
  • Wasa , K. and Hayakawa , S. 1991 . Handbook of Sputter Deposition Technology , 162 New Jersey : Noyes .
  • Adachi , H. and Wasa , K. 1991 . IEEE Trans. Ultrason. , 38 : 645
  • Zhang , W. , Sasaki , Y. and Hata , T. 1996 . J. Appl. Phys. , 35 : 1868
  • Wasa , K. , Satoh , T. , Adachi , H. , Setsune , K. and Trolier-McKinstry , S. Proc. 3rd Int. Symp. Sputter and Plasma Processes . Tokyo. pp. 83
  • Stemmer , S. and Ruhle , M. 1994 . private communication
  • Burton , W. K. , Cabera , N. and Frank , F. C. 1951 . Philos. Trans. R. Soc. London , A243 : 299
  • Wasa , K. , Satoh , T. , Adachi , H. , Setsune , K. , Trolier-McKinstry , S. and Schlom , D. G. 1996 . Mat. Res. Soc. Symp. Proc. , 401 : 151
  • Speck , J. S. , Seifert , A. , Pompe , W. and Ramesh , R. 1994 . J. Appl. Phys. , 76 : 477
  • Adachi , H. , Mitsuyu , T. , Yamazaki , O. and Wasa , K. 1986 . J. Appl. Phys. , 60 : 736
  • Rossetti , G. A. Jr. , Cross , L. and Kushida , K. 1991 . Appl. Phys. Lett. , 59 : 2524
  • Uchino , K. , Sadanaga , E. and Hirose , T. 1989 . J. Am. Ceram. Soc. , 72 : 1555

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