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Integrated Ferroelectrics
An International Journal
Volume 12, 1996 - Issue 2-4
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Session IV: Thin films

Preparation of BST thin films on Pt electrode on Si wafer with down-flow LSMCVD reactor

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Pages 185-197 | Received 27 May 1996, Published online: 19 Aug 2006

References

  • Nakazawa , H. , Yamane , H. and Hirai , T. 1991 . J. pn. J. Appl. Phys. , 30 : 2200
  • Shimizu , M. , Fujimoto , M. , Katayama , T. , Shiosaki , T. , Nakaya , K. , Fukagawa , M. and Tanikawa , E. 1993 . Mater. Res. Soc. Symp. Proc. , 310 : 255
  • Lesaicherre , P.-Y. , Yamamichi , S. , Yamaguchi , H. , Takemura , K. , Watanabe , H. , Tokashiki , K. , Satoh , K. , Sakuma , T. , Yoshida , M. , Ohnishi , S. , Nakajima , K. , Shibahara , K. , Miyasaka , Y. and Ono , H. 1994 . Tech. Dig. IEDM , : 831
  • Horikawa , T. , Mikami , N. , Makito , T. , Tamimura , J. , Kataoka , M. , Sato , K. and Nunoshita , M. 1993 . J pn. J. Appl. Phys. , 32 : 4126
  • Makita , T. , Horikawa , T. , Kuroki , H. , Kataoka , M. , Tanimura , J. , Mikami , N. , Sato , K. and Nunoshita , M. 1992 . Mater. Res. Soc. Symp. Proc. , 284 : 529
  • Okamura , T. , Adachi , M. , Shiosaki , T. and Kawabata , A. 1991 . J pn. J. Appl. Phys. , 53 : 727
  • Kwak , B. S. , Boyd , E. P. and Erbil , A. 1988 . Appl. Phys. Lett. , 53 : 1702
  • de Keijser , M. , Dormans , G. J. M. , Cillessen , J. F. M. , de Leeuw , D. M. and Zandbergen , H. W. 1991 . Appl. Phys. Lett. , 58 : 2636
  • Milne , S. J. and Pyke , S. H. 1991 . J. Am. Ceram. Soc. , 74 : 1407
  • McMillan , L. D. , Huffman , M. , Roberts , T. L. and Scott , M. C. 1994 . Integrated Ferroelectrics , 4 : 319
  • Imai , T. , Okuyama , M. and Kamakawa , Y. 1991 . J pn. J. Appl. Phys. , 30 : 2163
  • Tabata , H. , Kawai , T. , Kawai , S. , Murata , O. , Fujoka , J. and Minakata , S. 1991 . Appl. Phys. Lett. , 59 : 2354
  • Abe , K. and Komatsu , S. 1992 . J pn. J. Appl. Phys. , 31 : 2895
  • Kawahara , T. , Yamamuka , M. , Makita , T. , Yuuki , A. , Mikami , N. and Ono , K. 1995 . Mater. Res. Soc. Symp. Proc. , 361 : 361
  • Ichinose , N. and Ogiwara , T. 1995 . J pn. J. Appl. Phys. , 34 : 5198
  • Horikawa , T. , Makita , T. , Kuroiwa , T. and Mikami , N. 1995 . Jpn. J. Appl. Phys. , 34 : 5478
  • Lee , W. J. and Kim , H. G. 1995 . Integrated Ferroelectrics , 7 : 207
  • Brunstein , G. , Paz-Pujalt , G. R. and Mason , M. G. 1993 . J. Appl. Phys. , 73 ( 2 ) : 961
  • Phule , P. P. 1988 . Mater. Res. Soc. Symp. Proc. , 121 : 275
  • Yoon , Y. S. 1993 . J. Appl. Phys. , 73 ( 3 ) : 1547
  • Frenck , H. J. , Kulisch , W. , Kuhr , M. and Kassing , R. 1991 . Thin Solid Films , 201 : 327
  • Williams , L. M. and Hess , D. W. 1984 . J. Vac. Sci. Technol. A. , 4 : 1810
  • Viguie , J. C. and Spitz , J. 1975 . J. Electrochem. Soc. , 122 : 585
  • Li , P. , McDonald , J. F. and Lu , T.-M. 1992 . J. Appl. Phys. , 71 : 5596

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