Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 12, 1996 - Issue 2-4
Submit an article Journal homepage
8
Views
6
CrossRef citations to date
0
Altmetric
Session V: Thin films

Electrical properties of paraelectric PLT(28) thin films deposited by dc magnetron sputtering

H. H. Kim Department of Electronic Engineering, Doowon Institute of Technology, Kyeonggi-Do, Korea
,
D. H. Park Department of Electrical Engineering, Wonkwang University, Chunbuk, Korea
&
K. J. Lim Department of Electrical Engineering, Chungbuk National University, Chungbuk, Korea
Pages 241-249 | Received 27 May 1996, Published online: 19 Aug 2006

References

  • Adachi , H. and Wasa , K. 1991 . Sputtering Preparation of Ferroelectric PLZT Thin Films and Their Optical Application . IEEE Trans. Ultra. Ferro. Freq. Control , 38 ( 6 ) : 645
  • Takayama , R. 1987 . Preparation and Characteristics of Pyroelectric Infrared Sensors Made of c-axis Oriented La-Modified PbTiO3 Thin Films . J. Appl. Phys. , 61 ( 1 ) : 411
  • Chikarmane , V. 1992 . Annealing of PZT (65/35) Thin Films for ULSI Storage Dielectric Applications: Phase Transformation and Electrical Characteristics . J. Elect. Mater. , 21 ( 5 ) : 503
  • Sigmund , P. 1980 . Sputtering of Single and Multiple Component Materials . J. Vac. Sci. Technol. , 17 ( 1 ) : 396
  • Fox , G. and Krupanidhi , S. 1993 . Composition/Structure/Property Relations of Multi-Ion-Beam Reactive Sputtered Lead Lanthanum Titanate Thin Films: Part III. Electrical Properties . J. Mater. Res. , 8 ( 9 ) : 2203
  • Sawyer , C. and Tower , C. 1930 . Rochelle Salt as a Piezoelectric . Phys. Rev. , 35 : 269
  • Chikarmane , V. 1992 . Effects of Post-Deposition Annealing Ambient on the Electrical Characteristics and Phase Transformation Kinetics of Sputtering Lead Zirconate Titanate (65/35) Thin Film Capacitors . J. Vac. Sci. Technol. , 10 ( 4A ) : 1562
  • Duiker , H. 1990 . Fatigue and Switching in Ferroelectric Memories: Theorey and Experiment . J. Appl. Phys. , 68 ( 11 ) : 5783

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.