Preparation of Zr-rich PZT and La-doped PbTiO₃ thin films by RF magnetron sputtering and their properties for pyroelectric applications

Wensheng Wang Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University, Kosugi-machi, Toyama, 939-03, Japan

Zhiming Chen Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University, Kosugi-machi, Toyama, 939-03, Japan

Masatoshi Adachi Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University, Kosugi-machi, Toyama, 939-03, Japan

Akira Kawabata Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University, Kosugi-machi, Toyama, 939-03, Japan

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Preparation of Zr-rich PZT and La-doped PbTiO₃ thin films by RF magnetron sputtering and their properties for pyroelectric applications

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Preparation of Zr-rich PZT and La-doped PbTiO3 thin films by RF magnetron sputtering and their properties for pyroelectric applications

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Preparation of Zr-rich PZT and La-doped PbTiO₃ thin films by RF magnetron sputtering and their properties for pyroelectric applications