High dielectric constant Ba_xSr_1-xTiO₃ (BST) thin films made by mocvd techniques for dram applications

References

• Miyasaka , Y. and Matsubara , S. 1990 . Proc. 7th Int. Symp. Application of Ferroelectrics , pp. 121 New York : IEEE .
   Google Scholar
• Chern , C. S. , Liang , S. and Shi , Z. Q. 1994 . Appl. Phys. Lett. , 64 ( 23 ) : 3181 etc.
   Web of Science ®Google Scholar
• Seong Hwang , Cheol , Oh Park , Soon Ju Cho , Hag . 1995 . Appl. Phys. Lett. , 67 ( 19 ) : 2819
   Web of Science ®Google Scholar
• Horikawa , T. , Mikami , N. , Makita , T. , Tanimura , J. , Kataka , M. , Sato , K. and Nunoshita , M. 1993 . Jpn. J. Appl. Phys. , 32 : 4126
   Web of Science ®Google Scholar
• Kirlin , P. S. , Binder , R. L. and Gardiner , R. A. U. S. Patent, No. 5,204,314 . 1993 .
   Google Scholar
• Wessels , B. W. 1995 . Novel Techniques in Sysnthesis and Processing of Advanced Materials Edited by: Shngh , J. and Cople , S. M. 221
   Google Scholar
• Li , T. K. , Zawadzki , P. and Stall , R. A. 1996 . IEEE/CPMT Int'1 Electronics Manufacturing Technology Symposium 200
   Google Scholar
• Li , T. K. , Zawadzki , P. , Stall , R. A. , Thompson , A. G. , Walker , R. and Kroll , W. 1996 . SEMI Beijing 1996 Advanced Semiconductor Technology Conference 175
   Google Scholar
• Li , T. K. , Zawadzki , P. and Stall , R. A. Three Step PE-MOCVD of BST Thin Films . U. S. Patent Application .
   Google Scholar
• Li , Tingkai , Gurary , A. and Scott , Dane . Liquid Evaporator System and Methods . U. S. Patent Application .
   Google Scholar
• Li , T. K. , Zawadzki , P. and Stall , R. A. 1997 . Microstructure and Properties of PbZr1-xTixO3 Thin Films made by One and Two Step Metalorganic Chemical Vapor Deposition Santa Fe, NM presented at the 1997 ISIF Meeting
   Google Scholar
• Tompa , G. S. , Breiland , W. G. , Gurary , A. , Zawadzki , P. A. , Evans , G. H. , Esherick , P. , Kroll , B. and Stall , R. A. 1994 . Microelectronics Journal , 25 : 757
   Web of Science ®Google Scholar