References
- Taylor , T. C. and Harper , H. A. presented at Tegal 20th Annual Plasma Seminar Proceedings, San Francisco, Ca. (July, 1994) Chemically Assisted Etching of PZT-Based Ferroelectric Dielectric and Noble Metal Capacitor Electrodes
- Moazzami , R. 1994 . Electrical Characteristics of Ferroelectric PZT Thin Films For Gigabit-Scale Drams. 6th International Symposium on Integrated Ferroelectrics . March 1994 , Monterey, Ca..
- Ishihara , K. , Ishikawa , T. , Hamada , K. , Onishi , S. , Kudo , J. and Sakiyama , K. 1994 . The Degradation of Ferroelectric Properties of PZT Thin Films Due To Plasma Damage . 6th International Symposium on Integrated Ferroelectrics . March 1994 , Monterey, Ca..
- Sumi , Tatsumi , Moriwaki , Nobuyuki , Nakane , George , Nakakuma , Tetsuji , Judai , Yudi , Uemoto , Yasuhiro , Nagano , Yoshihisa , Hayashi , Shinichiro , Azuma , Masamichi , Otsuki , Tasuo , Kano , Gota , Cuchiaro , Joseph , Scott , Michael , McMillan , Larry and Paz DeAraujo , Carlos . 1994 . 256Kb Ferroelectric Nonvolatile Memory Technology for 1T/1C Cell With 100ns Read/Write Time At 3V . 6th International Symposium on Integrated Ferroelectrics . March 1994 , Monterey, Ca..