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Integrated Ferroelectrics
An International Journal
Volume 16, 1997 - Issue 1-4
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Memory devices and charecterization

Ti thickness effects in Pt/Ti bottom electrode on properties of (Ba, Sr)TiO3 thin film

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Pages 183-190 | Received 18 Mar 1996, Published online: 19 Aug 2006

References

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  • Jones , R. E. Jr. 1995 . Integrated Ferroelectrics , Vol. 6 : 81 – 92 .
  • Sreenivas , K. , Reaney , Ian , Maeder , T. , Setter , N. , Jagadish , C. and Elliman , R. G. 1994 . J. Appl. Phys. , 75 : 232
  • HASE , TAKASHI , SAKUMA , TOSHIYUKI , AMANUMA , KAZUSHI , MORI , Toru , OCHI , Atsushi and MIYASAKA , YOICI . 1995 . Integrated Ferroeletrics , Vol. 8 : 89 – 98 .
  • Al-Shareef , H. N. , Gifford , K. D. , Rou , S. H. , Hern , P. D. , Auciello , O. and Kingon , A. I. 1993 . Integrated Ferroelectrics , Vol. 3 : 321 – 332 .
  • MURARKA , SHYAM P. 1993 . Metallization Theory and Practice for VLSI and ULSI , 65 Boston : Butterworth-Heinemann . Chap. 5

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