Deposition of self-polarized PZT films by planar multi-target sputtering

References

• Takayama , R. , Tomita , Y. , Asayama , J. , Nomura , K. and Ogawa , H. 1990 . Sensors and Actuators , A21–A23 : 508 – 512 .
   Web of Science ®Google Scholar
• Polla , D. L. , Ye , C. and Tamagawa , T. 1991 . Appl. Phys. Lett. , 59 : 3539 – 3541 .
   Web of Science ®Google Scholar
• Okuyama , M. , Ohtani , K. , Ueda , T. and Hamakawa , Y. 1985 . Int. J. Infrared and Millimeter Waves , 6 : 71 – 78 .
   Google Scholar
• Bruchhaus , R. , Huber , H. , Pitzer , D. and Wersing , W. 1994 . Proceedings of the Electroceramics IV . 1994 , Aachen . Edited by: Waser , R. pp. 221 – 226 .
   Google Scholar
• Spierings , G. A.C.M. , Dormans , G. J.M. , Moors , W. G.J. , Ulenaers , M. J.E. and Larsen , P. K. Proc. of the 9th IEEE International Symp. on App. of Feroelectrics . Edited by: Pandey , R. K. , Liu , M. and Safari , A. pp. 29 – 32 . IEEE .
   Google Scholar
• Lax , D'Ans . Taschenbuch für Chemiker und Physiker, Band 1, 3. Auflage, 1967, p. 1-561 for TiO2, p. 1-100 for Si, p. 1-97 for Pt.
   Google Scholar
• Cook , W. R. Jr , Berlincourt , D. A. and Scholz , F. J. 1963 . J. Appl. Phys. , 34 : 1392
   Web of Science ®Google Scholar