Evaluation of electrical properties and SIMS profiles on forming gas(N₂-H₂) annealed Pt/PZT/Pt capacitors

References

• Jones , R. E. Jr. , Maniar , P. D. , Moazzami , R. , Zurcher , P. , Witoaski , J. Z. , Lii , Y. T. , Chu , P. and Gillespie , S. J. 1995 . Thin Solid Films , 270 : P584 – 588 .
   Web of Science ®Google Scholar
• Takatani , Shinichiro , Kushida-Abdelghafar , Keiko and Miki , Hiroshi . 1997 . Jpn. J. Appl. Phys. , 36 ( 4A ) Part 2
   PubMedGoogle Scholar
• Miki , Hiroshi , Kushida-Abdelghafar , Keiko , Torii , Kazuyoshi and Fujisaki , Yoshihisa . 1997 . Jpn. J. Appl. Phys. , 36 ( 3A ) Part 1
   PubMedGoogle Scholar
• Kushida-Abdelghafar , Keiko , Miki , Hiroshi , Torii , Kazuyoshi and Fujisaki , Yoshihisa . 1996 . J. Appl. Phys. , 69 ( 21 )
   Google Scholar
• Fujisaki , Yoshihisa , Kushida-Abdelghafar , Keiko , Shimamoto , Yasuhiro and Miki , Hiroshi . 1997 . J. Appl. Phys. , 82 ( 1 )
   Google Scholar
• Jin-Ping Han and Ma , T. P. 1997 . ISIF , 9 March 2–6 : 7
   Google Scholar
• Warren , W. L. , Dimos , D. , Pike , G. E. , Tuttle , B. A. , Raymond , M. V. , Ramesh , R. and Evans , J. T. Jr . 1995 . J. Appl. Phys. , 67 ( 6 )
   Google Scholar