Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 21, 1998 - Issue 1-4
112
Views
22
CrossRef citations to date
0
Altmetric
Session 5. Materials Processing-PVD

Epitaxial and large area PLD ferroelectric thin film heterostructures on silicon substrates

, , , , &
Pages 485-498 | Received 04 Jun 1998, Published online: 19 Aug 2006

References

  • Okamoto , K. , Nasu , Y. and Hamakawa , Y. 1981 . IEEE Transactions on Electron Devices , ED-28 : 698
  • Scott , J. F. and Paz de Araujo , C. A. 1989 . Science , 246 : 1400
  • Yoo , I. K. and Desu , S. B. 1993 . Journal of Intelligent Material Systems and Structures , 4 : 490
  • 1992 . International Patent , H01L27/115, 21/320529/92 Symetrix Corp.
  • Greer , J. A. and Tabat , M. D. 1995 . J. Vac. Sci. Technol. , A13 : 1175
  • Dietsch , R. , Holz , Th. , Mai , H. , Panzner , M. and Völlmar , S. 1995 . Optical and Quantum Electronics , 27 : 1385
  • Lorenz , M. , Hochmuth , H. , Börner , H. and Natusch , D. 1994 . Physica C , 235 : 639
  • Lorenz , M. , Hochmuth , H. , Natusch , D. , Börner , H. , Lippold , G. , Kreher , K. and Schmitz , W. 1996 . Appl. Phys. Lett. , 68 : 3332
  • Pignolet , A. , Welke , S. , Curran , C. , Senz , S. and Hesse , D. 1998 . Journal of the Korean Physical Society , 32 : S1476 Proc. IMF-9
  • Pignolet , A. , Curran , C. , Welke , S. , Alexe , M. , Senz , S. , Hesse , D. and Gösele , U. Sept. 29–30 1997 . Proc. EMIF-2 , Sept. 29–30 , France : Jouy-en Josas .
  • Pignolet , A. , Curran , C. , Welke , S. , Senz , S. , Alexe , M. , Hesse , D. and Gösele , U. 1996 . Mat. Res. Soc. Symp. Proc. , 433 : 125
  • Pignolet , A. , Welke , S. , Curran , C. , Alexe , M. , Senz , S. and Hesse , D. 1997 . Ferroelectrics , 202 : 285
  • Correra , L. and Nicoletti , S. 1995 . Mater. Sci. & Eng. , B32 : 33
  • Curran , C. 1997 . Gepulste Laserabscheidung von Aurivillius-Phasen für ferroelektrische dünne Schichten , Halle-Wittenberg : Martin-Luther-Universität . Dissertation
  • Curran , C. , Senz , S. , Pignolet , A. , Alexe , M. , Welke , S and Hesse , D. 1997 . Mat. Res. Soc. Symp. Proc. , 474 : 15
  • Ianno , N. J. and Erington , K. B. 1992 . Rev. Sci. Instrum. , 63 : 3525
  • Cillessen , J. F. M. , De Jonge , M. J. M. and Croizé , X. 1996 . Rev. Sci. Instrum. , 67 : 3229
  • Desu , S. B. , Vijay , D. P. , Zhang , X. and He , B. P. 1996 . Appl. Phys. Lett. , 69 : 1719
  • Buhay , H. , Sinharoy , S. , Kasner , W. H. and Francombe , M. H. 1991 . Appl. Phys. Lett. , 58 : 1479
  • Nakamura , T. , Muhammet , R. , Shimizu , M. and Shiosaki , T . 1995 . Integrated Ferroelectrics , 6 : 35
  • Karimi , A. , Okamura , S. , Ando , S. and Tsukamoto , T. 1995 . Jpn. J. Appl. Phys. , 34 : 5197
  • Gu , H. , Kuang , A. , Wang , S. , Bao , D. , Wang , L. , Liu , J. and Liu , X. 1996 . Appl. Phys. Lett. , 68 : 1210
  • Alexe , M. , Scott , J. F. , Curran , C. , Zakharov , N. D. , Hesse , D. and Pignolet , A. Appl. Phys. Lett. , accepted for publication in

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.