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Integrated Ferroelectrics
An International Journal
Volume 20, 1998 - Issue 1-4
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Contributed papers

Effects of NH3 carrier gas on the deposition and electrical characteristics of (SrTi)O3 films grown by ecr plasma assisted mocvd

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Pages 173-189 | Received 25 Sep 1996, Accepted 17 Dec 1996, Published online: 27 Sep 2006

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