Epitaxial BaTiO₃ films on silicon for MFSFET applications

Jerry Hallmark Motorola, Phoenix Corporate Research Laboratories, 2100 E. Elliot Road, EL508, Tempe, AZ, 85284

Zhiyi Yu Motorola, Phoenix Corporate Research Laboratories, 2100 E. Elliot Road, EL508, Tempe, AZ, 85284

Ravi Droopad Motorola, Phoenix Corporate Research Laboratories, 2100 E. Elliot Road, EL508, Tempe, AZ, 85284

Jamal Ramdani Motorola, Phoenix Corporate Research Laboratories, 2100 E. Elliot Road, EL508, Tempe, AZ, 85284

Jay Curless Motorola, Phoenix Corporate Research Laboratories, 2100 E. Elliot Road, EL508, Tempe, AZ, 85284

Corey Overgaard Motorola, Phoenix Corporate Research Laboratories, 2100 E. Elliot Road, EL508, Tempe, AZ, 85284

Jeff Finder Motorola, Phoenix Corporate Research Laboratories, 2100 E. Elliot Road, EL508, Tempe, AZ, 85284

Dan Marshall Motorola, Phoenix Corporate Research Laboratories, 2100 E. Elliot Road, EL508, Tempe, AZ, 85284

Jun Wang Motorola, Phoenix Corporate Research Laboratories, 2100 E. Elliot Road, EL508, Tempe, AZ, 85284

Bill Ooms Motorola, Phoenix Corporate Research Laboratories, 2100 E. Elliot Road, EL508, Tempe, AZ, 85284

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Epitaxial BaTiO₃ films on silicon for MFSFET applications

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Epitaxial BaTiO3 films on silicon for MFSFET applications

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Epitaxial BaTiO₃ films on silicon for MFSFET applications