Picosecond ultrasound spectroscopy for studying elastic modulus of thin films: a review

References

• Dunn , M.L. , Ledbetter , H. , Heyliger , P.R. and Choi , C.S. 1996 . Elastic constants of textured short-fiber composites . J. Mech. Phys. Sol. , 44 : 1509 – 1513 .
   Web of Science ®Google Scholar
• Morishita , T. and Hirao , M. 1997 . Creep damage modeling based on ultrasonic velocities in copper . Int. J. Sol. Struct. , 34 : 1169 – 1173 .
   Google Scholar
• Ogi , H. , Shimoike , G. , Hirao , M. , Takashima , K. and Higo , Y. 2002 . Anisotropic elastic-stiffness coefficients of an amorphous Ni–P film . J. Appl. Phys. , 91 : 4857 – 4862 .
   Google Scholar
• Nix , W.D. 1989 . Mechanical properties of thin films . Metall. Trans. , 20A : 2217 – 2245 .
   Web of Science ®Google Scholar
• Suwito , W. , Martin , D. , Cunningham , S. and Read , D. 1999 . Elastic moduli, strength, and fracture initiation at sharp notches in etched single crystal silicon microstructures . J. Appl. Phys. , 85 : 3519 – 3534 .
   Google Scholar
• Huang , H. and Spaepen , F. 2000 . Tensile testing of free-standing Cu, Ag and Al thin films and Ag/Cu multilayers . Acta Mater. , 48 : 3261 – 3269 .
   Web of Science ®Google Scholar
• Ogura , A. , Tarumi , R. , Shimojo , M. , Takashima , K. and Higo , Y. 2001 . Control of nanocrystalline orientation using the application of a stress field in an amorphous alloy . Appl. Phys. Lett. , 79 : 1042 – 1044 .
   Web of Science ®Google Scholar
• Takashima , K. , Koyama , S. , Nakai , K. and Higo , Y. 2003 . Development of fatigue pre-cracking method into micro-sized specimens for measuring fracture toughness . MRS Symp. Proc. , 741 : 35 – 40 .
   Google Scholar
• Jennett , N.M. , Aldrich-Smith , G. and Maxwell , A.S. 2004 . Validated measurement of Young's modulus, Poisson ratio, and thickness for thin coatings by combining instrumented nanoindentation and acoustical measurements . J. Mater. Res. , 19 : 143 – 148 .
   Web of Science ®Google Scholar
• Fernandes , J.V. , Antunes , J.M. , Sakharova , N.A. , Oliveira , M.C. and Menezes , L.F. 2010 . Young's modulus of thin films using depth-sensing indentation . Phil. Mag. Lett. , 90 : 9 – 22 .
   Web of Science ®Google Scholar
• Mizubayashi , H. , Matsuno , J. and Tanimoto , H. 1999 . Young's modulus of silver films . Scripta Mater. , 41 : 443 – 448 .
   Google Scholar
• Sakai , S. , Tanimoto , H. and Mizubayashi , H. 1999 . Mechanical behavior of high-density nanocrystalline gold prepared by gas deposition method . Acta Mater. , 47 : 211 – 217 .
   Google Scholar
• Rowell , N. and Stegeman , G. 1978 . Theory of Brillouin scattering from opaque media . Phys. Rev. B , 18 : 2598 – 2615 .
   Google Scholar
• Moretti , A. , Robertson , W. , Fisher , B. and Bray , R. 1985 . Surface-enhanced Brillouin scattering on silver films . Phys. Rev. B , 31 : 3361 – 3368 .
   Google Scholar
• Sandercock , J. 1982 . “ Light scattering in solids III ” . In Topics in Applied Physics , Edited by: Cardona , M. and Güntherodt , G. Vol. 51 , 173 New York : Springer .
   Google Scholar
• Moreau , A. , Ketterson , J. and Huang , J. 1990 . Three methods for measuring the ultrasonic velocity in thin films . Mater. Sci. Eng. A , 126 : 149 – 154 .
   Web of Science ®Google Scholar
• Kim , J. , Achenbach , J. , Shinn , M. and Barnett , S. 1992 . Effective elastic constants and acoustic properties of single-crystal TiN/NbN superlattices . J. Mater. Res. , 7 : 2248 – 2256 .
   Google Scholar
• So , J.H. , Gladden , J.R. , Hu , Y.F. , Maynard , J.D. and Li , Q. 2003 . Measurements of elastic constants in thin films of colossal magnetoresistance material . Phys. Rev. Lett. , 90 036103
   Google Scholar
• Ogi , H. , Nakamura , N. , Tanei , H. , Ikeda , R. , Hirao , M. and Takemoto , M. 2005 . Off-diagonal elastic constant and sp2-bonded graphitic grain boundary in nanocrystalline-diamond thin films . Appl. Phys. Lett. , 86 231904
   Google Scholar
• Nakamura , N. , Ogi , H. , Ono , T. and Hirao , M. 2005 . Elastic constants and magnetic anisotropy of Co/Pt superlattice thin films . Appl. Phys. Lett. , 86 111918
   Google Scholar
• Pestka , K.A. II , Maynard , J.D. , Gao , D. and Carraro , C. 2008 . Measurement of the elastic constants of a columnar SiC thin film . Phys. Rev. Lett. , 100 055503
   Google Scholar
• Ogi , H. , Fujii , M. , Nakamura , N. , Yasui , T. and Hirao , M. 2007 . Stiffened ultrathin Pt films confirmed by acoustic-phonon resonances . Phys. Rev. Lett. , 98 195503
   Google Scholar
• Ogi , H. , Fujii , M. , Nakamura , N. , Shagawa , T. and Hirao , M. 2007 . Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films . Appl. Phys. Lett. , 90 191906
   Google Scholar
• Nakamura , N. , Ogi , H. , Yasui , T. , Fujii , M. and Hirao , M. 2007 . Mechanism of elastic softening behavior in superlattice . Phys. Rev. Lett. , 99 035502
   Google Scholar
• Tanei , H. , Nakamura , N. , Ogi , H. , Hirao , M. and Ikeda , R. 2008 . Unusual elastic behavior of nanocrystalline diamond thin films . Phys. Rev. Lett. , 100 016804
   Google Scholar
• Thomsen , C. , Strait , J. , Vardeny , Z. , Maris , H.J. , Tauc , J. and Hauser , J.J. 1984 . Coherent phonon generation and detection by picosecond light pulses . Phys. Rev. Lett. , 53 : 989 – 992 .
   Web of Science ®Google Scholar
• Thomsen , C. , Grahn , H.T. , Maris , H.J. and Tauc , J. 1986 . Surface generation and detection of phonons by picosecond light pulses . Phys. Rev. B , 34 : 4129 – 4138 .
   Web of Science ®Google Scholar
• Grahn , H.T. , Maris , H.J. , Tauc , J. and Hatton , K.S. 1988 . Elastic properties of silicon oxynitride films determined by picosecond acoustics . Appl. Phys. Lett. , 53 : 2281 – 2283 .
   Web of Science ®Google Scholar
• Zhu , T.C. , Maris , H.J. and Tauc , J. 1991 . Attenuation of longitudinal-acoustic phonons in amorphous SiO2 at frequencies up to 440 GHz . Phys. Rev. B , 44 : 4281 – 4289 .
   Web of Science ®Google Scholar
• Devos , A. and Lerouge , C. 2001 . Evidence of laser-wavelength effect in picosecond ultrasonics: possible connection with interband transitions . Phys. Rev. Lett. , 86 : 2669 – 2672 .
   Google Scholar
• Wright , O.B. , Perrin , B. , Matsuda , O. and Gusev , V.E. 2001 . Ultrafast carrier diffusion in gallium arsenide probed with picosecond acoustic pulses . Phys. Rev. B , 64 081202(R)
   Google Scholar
• Tanei , H. , Kusakabe , K. , Ogi , H. , Nakamura , N. and Hirao , M. 2009 . Observation of gamma-point phonon frequency in ultrathin metallic films confirmed by ab initio calculation and lattice dynamics . Appl. Phys. Lett. , 95 011902
   Google Scholar
• Tanigaki , K. , Kusumoto , T. , Ogi , H. , Nakamura , N. and Hirao , M. 2010 . Measurement of elastic constant and refraction index of thin films at low temperatures using picosecond ultrasound . Jpn. J. Appl. Phys. , 49 : 07HB01
   Google Scholar
• Devos , A. and Côte , R. 2004 . Strong oscillations detected by picosecond ultrasonics in silicon: evidence for an electronic-structure effect . Phys. Rev. B , 70 125208
   Google Scholar
• Emery , P. and Devos , A. 2006 . Acoustic attenuation measurements in transparent materials in the hypersonic range by picosecond ultrasonics . Appl. Phys. Lett. , 89 191904
   Google Scholar
• Devos , A. , Foret , M. , Ayrinhac , S. , Emery , P. and Rufflé , B. 2008 . Hypersound damping in vitreous silica measured by picosecond acoustics . Phys. Rev. B , 77 100201(R)
   Google Scholar
• Matsuda , O. , Wright , O.B. , Hurley , D.H. , Gusev , V.E. and Shimizu , K. 2004 . Coherent shear phonon generation and detection with ultrashort optical pulses . Phys. Rev. Lett. , 93 095501
   Google Scholar
• Ogi , H. , Shagawa , T. , Nakamura , N. , Hirao , M. , Odaka , H. and Kihara , N. 2008 . Elastic constant and Brillouin oscillations in sputtered vitreous SiO2 thin films . Phys. Rev. B , 78 134204
   Google Scholar
• Parratt , L. 1954 . Surface studies of solids by total reflection of X-rays . Phys. Rev. , 95 : 359 – 369 .
   Web of Science ®Google Scholar
• Tompkins , H.G. and McGahan , W.A. 1999 . Spectroscopic Ellipsometry and Re?ectometry , New York : Wiley .
   Google Scholar
• Nakamura , N. , Ogi , H. and Hirao , M. 2008 . Stable elasticity of epitaxial Cu thin films on Si . Phys. Rev. B , 77 245416
   Google Scholar
• Clemens , B.M. and Eesley , G.L. 1988 . Relationship between interfacial strain and the elastic response of multilayer metal films . Phys. Rev. Lett. , 61 : 2356 – 2359 .
   PubMed Web of Science ®Google Scholar
• Ogi , H. , Shagawa , T. , Nakamura , N. and Hirao , M. 2009 . Extraction of interface stiffness in superlattices: proposal of the interface elasticity parameter . Appl. Phys. Express , 2 105001
   Google Scholar
• Rabaste , S. , Bellessa , J. , Brioudea , A. , Bovier , C. , Plenet , J.C. , Breniera , R. , Marty , O. , Mugnier , J. and Dumas , J. 2002 . Sol–gel fabrication of thick multilayers applied to Bragg reflectors and microcavities . Thin Solid Films , 416 : 242 – 247 .
   Google Scholar
• Rey-Mermet , S. , Lanz , R. and Muralt , P. 2006 . Bulk acoustic wave resonator operating at 8 GHz for gravimetric sensing of organic films . Sens. Actuat. B , 114 : 681 – 686 .
   Google Scholar