The oxidation of silicon by dry oxygen can we distinguish between models?

References

• Amsel , G. 1980 . La Physique Contemporaine , Paris : Fondation Louis de Broglie .
   Google Scholar
• Bendat , J. S. and Piersol , A. G. 1971 . Random Data: Analysis and Measurement Procedures , New York : Wiley-Interscience .
   Google Scholar
• Bevington , P. R. 1969 . Data Reduction and Error Analysis for the Physical Sciences , New York : McGraw-Hill .
   Google Scholar
• Blanc , J. 1978a . Semiconductor Characterization Technique , Edited by: Barnes , P. A. and Rozgonyi , G. A. 139 Pennington , NJ : The Electrochemical Society . 1978b, Appl. Phys. Lett., 33, 424; 1986, Extended Abstracts, Fall Meeting of the Electrochemical Society, Vol. 86-2 (Pennington, NJ: The Electrochemical Society), p. 542.
   Google Scholar
• Costello , J. A. and Tressler , R. E. 1984 . J. electrochem. Soc. , 131 : 914
   Web of Science ®Google Scholar
• Deal , B. E. and Grove , A. S. 1965 . J. appl. Phys. , 36 : 1965
   Google Scholar
• Eernisse , E. P. 1977 . Appl. Phys. Lett. , 30 : 290
   Web of Science ®Google Scholar
• Fargeix , A. and Ghibaudo , G. 1983 . J. appl. Phys. , 54 : 7153 1984, Ibid., 56, 589.
   Web of Science ®Google Scholar
• Grunthaner , J. and Maserjian , J. 1977 . I.E.E.E. Trans. Nucl. Sci. , 24 : 2108
   Web of Science ®Google Scholar
• Han , C. J. and Helms , C. R. 1986a . J. appl. Phys. , 59 : 1767 1986b, Semiconductor Silicon 1986, edited by H. R. Huff, T. Abe, and B. Kobelson (Pennington, NJ: The Electrochemical Society), p. 408.
   Web of Science ®Google Scholar
• Ho , C. P. and Plummer , J. P. 1979 . J. electrochem. Soc , 126 : 1516, 1523
   Google Scholar
• Hopper , M. A. , Clarke , R. A. and Young , L. 1975 . J. electrochem. Soc. , 122 : 1216
   Web of Science ®Google Scholar
• Irene , E. A. and Van Der Meulen , Y. J. 1976 . J. electrochem. Soc. , 123 : 1380
   Web of Science ®Google Scholar
• Irene , E. A. and Ghez , R. 1977 . J. electrochem. Soc. , 124 : 1757
   Web of Science ®Google Scholar
• Murali , V. 1986 . J. appl. Phys. , 60 : 2106
   Web of Science ®Google Scholar
• Ng , K. K. , Polito , W. J. and Ligenza , J. R. 1984 . Appl. Phys. Lett. , 44 : 626
   Web of Science ®Google Scholar
• Norton , F. J. 1961 . Nature, Lond. , 171 : 701
   Google Scholar
• Ponpon , J. P. , Grob , J. J. , Grob , A. and Stuck , R. 1986 . J. appl. Phys. , 59 : 3921
   Web of Science ®Google Scholar
• Revesz , A. G. , Mrstik , B. J. , Hughes , H. L. and McCarthy , H. L. 1986 . J. electrochem. Soc. , 133 : 586
   Web of Science ®Google Scholar
• Rochet , F. 1986 . Thèse de doctorat et sciences physiques, Université de Paris VII
   Google Scholar
• Rochet , F. , Agius , B. and Rigo , S. 1984 . J. electrochem. Soc. , 131 : 914
   Web of Science ®Google Scholar
• Rosencher , E. , Straboni , A. , Rigo , S. and Amsel , G. 1979 . Appl. Phys. Lett. , 34 : 254
   Web of Science ®Google Scholar
• Schwettman , F. N. , Chiang , K. L. and Brown , W. A. 1978 . Extended Abstracts , Vol. 78–1 , 688 Pennington , NJ : The Electrochemical Society . No. 278
   Google Scholar
• Taft , E. A. 1978 . J. electrochem. Soc , 125 : 968
   Web of Science ®Google Scholar
• Wolters , D. R. and van Duijhoven , A. T. A. Z. 1987 . Phil. Mag. B , 55 : 669
   Web of Science ®Google Scholar