26
Views
14
CrossRef citations to date
0
Altmetric
Original Articles

Reacted amorphous layers: Tantalum and niobium oxides

, &
Pages 529-538 | Received 06 Apr 1988, Accepted 11 May 1988, Published online: 20 Aug 2006

References

  • Anderson , T. , Christou , A. and Davey , J. E. 1983 . Thin Solid Films , 104 : 57
  • Baglin , J. E. , Dempsey , J. J. , Hammer , W. , d'Heurle , F. M. , Petersson , C. S. and Serrano , C. 1979 . J. Electron. Mater. , 8 : 641
  • Baglin , J. E. , d'Heukle , F. M. , Hammer , W. and Petersson , C. S. 1980 . Nucl. Instrum. Methods , 168 : 491
  • Brebec , G. , Seguin , R. , Sella , C. , Bevenot , J. and Martin , J. C. 1980 . Acta metall. , 28 : 327
  • Butz , R. , Rubloff , G. W. , Tan , T. Y. and ho , P. S. 1984 . Phys. Rev. B , 30 : 5421
  • Chen , W. K. and Jackson , R. A. 1967 . J. chem. Phys. , 47 : 1144
  • Cheng , Y.-T. , Johnson , W. L. and Nicolet , M.-A. 1985 . Appl. Phys. Lett. , 47 : 800
  • Cheng , Y.-T. , Nicolet , M.-A. and Johnson , W. L. 1986 . Mater. Res. Soc. Symp. Proc. , 54 : 175
  • Clemens , B. M. and Suchowski , M. 1985 . Appl. Phys. Lett. , 47 : 943
  • d'Heurle , F. M. and Gas , P. 1986 . J. Mater. Res. Soc. , 1 : 205
  • Elliott , R. P. 1965 . Constitution of Binary Alloys , 272 New York : McGraw-Hill .
  • Face , D. W. and Prober , D. E. 1987 . J. vac. Sci. Technol. A , 5 : 3408
  • Gel'd , P. V. and Lyubimow , V. D. 1963 . Izv. Sibirsk. Otd. Akad. Nauk SSSR Ser. Khim. Nauk , 79
  • Geri , M. and Guilmin , P. 1988 . Nonlinear Phenomena in Material Science , Edited by: Kubin , L. and Martin , G. 215 Aedermansdorf , , Switzerland : Trans Tech .
  • Gmelins Handhuch der anorganischen Chermie: Niob, 1970, System-nummer 49 , Vol. Teil B1 , 49 Weinheim : Verlag Chemie .
  • Hansen , M. 1958 . Constitution of Binary Alloys , 1267 1268 New York : McGraw-Hill .
  • Hauffe , K. 1965 . Oxidation of Metals , New York : Plenum Press .
  • Herd , S. R. , Ahn , K. Y. and Tu , K. N. 1983 . Mater. Res. Soc. Symp. Proc. , 18 : 197
  • Holloway , K. and Sinclair , R. 1987 . Mater. Res. Soc. Symp. Proc. , 77 : 357
  • Holtzberg , F. and Reisman , A. 1961 . J. chem. Phys. , 65 : 1192
  • Hörz , G. , Speck , H. , Fromm , E. and Jehn , H. 1981 . Gases and Carbon in Metals, Niobium , 27 Karlsruhe : Fach informations-zentrum . 1981, Gases and Carbon in Metals, Tantalum (Karlsruhe: Fach informations-zentrum), p. 27.
  • Kofstad , P. 1966 . High-Temperature Oxidation of Metals , New York : John Wiley .
  • Levin , E. M. and McMurdie , H. F. 1975 . Phase Diagrams for Ceramists, 1975 Supplement , 175 Columbus , Ohio : American Ceramic Society .
  • Matzke , Hj. 1981 . Nonstoichiometric Oxides , Edited by: Toft Sørensen , O. 203 New York : Academic Press .
  • Newcomb , S. B. and Tu , K. N. 1986 . Appl. Phys. Lett. , 48 : 1436
  • Nowotny , J. 1982 . Transport in Non-Stoichiometric Compounds , Amsterdam : Elsevier .
  • Oehrlein , G. S. 1983 . J. appl. Phys. , 54 : 6502
  • Oehrlein , G. S. , d'Heurle , F. M. and Reisman , A. 1984 . J. appl. Phys. , 55 : 3715
  • Perriere , J. and Siejka , J. 1983 a . J. electrochem. Soc. , 130 : 1260 1983b, J. electrochem. Soc., 130, 1267.
  • Petersson , C. S. , Baglin , J. E. , d'Heurle , F. M. , Dempsey , J. J. , Harper , J. M. , Serrano , C. M. , Tsai , M. Y. and Poatedr , J. 1980 . Thin Film Interfaces and Interactions , Edited by: Baglin , J. E. and Poatedr , J. 290 Pennington : The Electrochemical Society .
  • Raaijmakers , I. J. M. M. , Raeder , A. H. and van Houtum , H. J. W. 1987 . J. appl. Phys. , 61 : 2527
  • Reisman , A. and Holtzberg , F. 1970 . High Temperature Oxides, Part 11 , Edited by: Alper , A. M. 217 New York : Academic Press .
  • Rigo , S. 1986 . Instabilities in Silicon Devices , Edited by: Barbottin , G. and Vapaille , A. 5 Amsterdam : Elsevier .
  • Rossini , F. D. , Wayman , D. D. , Evans , W. H. , Levine , S. and Jaffe , I. 1952 . Selected Values of Chemical Thermodynamic Properties , 302 303 Washington : National Bureau of Standards .
  • Schröder , H. , Samwer , K. and Köster , U. 1985 . Phys. Rev. Lett. , 54 : 197
  • Schwartz , R. B. and Johǹson , W. L. 1983 . Phys. Rev. Lett. , 51 : 415
  • Schwartz , R. B. , Wong , K. L. , Johnson , W. L. and Clemens , B. M. 1984 . J. non-crystalline Solids , 61 & 62 : 129
  • Stearns , M. B. , Petford , L. A. K. , Chang , C. H. , Stearns , D. G. , Ceglio , N. M. and Havryluk , A. M. 1987 . Mater. Rex Soc. Symp. Proc. , 77 : 345
  • Straboni , A. 1979 . Orsay : Universitè Paris-Sud . Ph.D. Thesis
  • Sørensen , T. O. 1981 . Non-Stoichiometric Oxides , New York : Academic Press .
  • Villars , P. and Calvert , D. 1986 . Pearson's Handbook of Crystallographic Data for Intermetallic Phases , Vol. 3 , 2819 2933 Metals Park , Ohio : American Society for Metals .
  • Wadsley , A. D. and Anderson , S. 1970 . Perspectives in Structural Chemistry , Edited by: Dunitz , J. D. and Ibers , J. A. Vol. 3 , 1 New York : John Wiley .
  • Wells , A. F. 1984 . Structural Inorganic Chemistry , 548 Oxford : Clarendon Press .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.