Structural analysis of TiN_x films prepared by reactive-ion-beam-enhanced deposition

References

• Enzo , S. , Fagherazzi , G. , Benedetti , A. and Pollizi , S. 1988 . J. appl. Crystallogr. , 21 : 536
   Web of Science ®Google Scholar
• Guzman , L. , Elena , M. , Giacomozzi , F. , Astrurizaga , O. , Narsale , A. M. and Kothari , D. C. 1989 . Proceedings of the First International Conference on Plasma Surface Engineering , 995 – 1002 . Oberursel : DGM Informations-gesellschaft Verlag .
   Google Scholar
• Guzman , L. , Giacomozzi , F. , Margesin , B. , Calliari , L. , Fedrizzi , L. , Ossi , P. M. and Scotoni , M. 1987 . Mater. Sci. Engng , 90 : 349
   Google Scholar
• Hartley , N. E. W. 1975 . J. vac. Sci. Technol. , 12 : 485
   Web of Science ®Google Scholar
• Hayashi , K. , Sugiyama , K. , Fukutani , K. and Kittaka , H. 1989 . Mater. Sci. Engng A , 115 : 349
   Web of Science ®Google Scholar
• Holleck , H. 1986 . J. vac. Sci. Technol. , A4 : 2661
   Google Scholar
• Kant , R. A. , Sartwell , B. D. , Singer , I. L. and Vardiman , R. G. 1985 . Nucl. Instrum. Meth. B , 7/8 : 915
   Web of Science ®Google Scholar
• Klug , H. P. and Alexander , L. E. 1974 . X-ray Difiaction Procedures for Polycrystalline and Amorphous Material , New York : Wiley .
   Google Scholar
• Linker , G. 1987 . Nucl. Instrum. Methods B , 19–20 : 526
   Web of Science ®Google Scholar
• Margesin , B. , Giacomozzi , F. , Guzman , L. , Lazzari , G. and Zanini , V. 1987 . Nucl. Instrum. Meth. B , 21 : 566
   Web of Science ®Google Scholar
• Nandi , R. K. , Kuo , H. K. , Schlosberg , W. , Wisler , G. , Cohen , J. B. and Crist , B. Jr. 1984 . J. appl. Crystallogr. , 17 : 22
   Web of Science ®Google Scholar
• Pons , F. , Pivin , J. C. and Farges , G. 1897 . J. Mater. Res. , 2 : 580
   Google Scholar
• Skeleton , E. F. , Wolf , S. A. and Francavella , T. L. 1981 . J. vac. Sci. Technol. , 18 : 259
   Web of Science ®Google Scholar
• Sundgren , J. E. 1985 . Thin Solid Films , 128 : 21
   Web of Science ®Google Scholar
• Valvoda , V. R. , Kuzel , R and Musil , J. 1988 . Thin Solid Films , 156 : 53
   Web of Science ®Google Scholar
• Warren , B. E. and Averback , B. J. 1952 . J. appl. Phys. , 23 : 1059
   Web of Science ®Google Scholar