125
Views
1
CrossRef citations to date
0
Altmetric
Research Article

Dynamic analysis of micro-cantilever with electrostatic force

, , &
Pages 875-882 | Received 06 Jan 2020, Accepted 21 Apr 2020, Published online: 12 May 2020

References

  • Abdalla, M. M., C. K. Reddy, W. F. Faris, and Z. Gurdal. 2005. “Optimal Design of an Electrostatically Actuated Micro-beam for Maximum Pull-in Voltage.” Computers & Structures 83: 1320–1329.
  • Bao, M., and H. Yang. 2007. “Squeeze Film Air Damping in MEMS.” Sensors and Actuators A 136: 3–27.
  • Bashmal, S. 2014. “Static and Dynamic Analysis of Micro Cantilever Beam under Electrical Loading Using Couple Stress Theory.” ASME Mechanical Engineering Congress and Exposition. April.2014. ISBN:978-0-7918-5624-6 : 254-261
  • Changizi, A., M. Sarafrazi, and I. Stiharu “Nonlinear Analysis of Pull-in Voltage of Twin Micro-Cantilever Beams with Different Dimensions.” International Conference of Control, Dynamic Systems, and Robotics (CDSR’17) Toronto, Canada – August 21 – 23, 2017
  • Chaterjee, S., and G. Pohit. 2009. “A Large Deflection Model for the Pull-in Analysis of Electrostatically Actuated Micro-cantilever Beams.” Journal of Sound and Vibration 322: 969–986.
  • De, S. K., and N. R. Aluru. 2004. “Full-Lagrangian Schemes for Dynamic Analysis of Electrostatic MEMS.” Journal of Microelectromechanical System 13: 737 - 758
  • Degani, O. B., and Y. Nemirovsky. 2002. “Modeling the Pull in Parameter of Electrostatic Actuators with Novel Lumped Two Degree of Freedom Pill-in Model.” Sensors and Actuators 97-98: 569–578.
  • Huang, J. H., K. M. Liew, C. H. Wong, M. J. Tang, and A. Q. Liu. 2001. “Mechanical Design and Optimization of Capacitive Micromachined Switch.” Sensors and Actuators 93: 273–285.
  • Jia, X. L., J. Yang, S. Kitipornchai, and C. W. Lim. 2011. “Pull-in Instability and Free Vibration of Electrically Actuated poly-SiGe Graded Micro-beams with a Curved Ground Electrode.” Applied Mathematical Modelling. 36(5): 1875-1884
  • Joglekar, M. M., and D. N. Pawaskar. 2011. “Estimation of Oscillation Period/switching Time for Electrostatically Actuated Micro-beam Type Switches.” International Journal of Mechanical Sciences 53: 116–125.
  • Kim, Y. 2017. “An Evaluation Technique for High Frequency Dynamic Behavior of a Sandwich Micro Cantilever Beam.” Journal of Sandwich Structure and Material. May.21(3): 1133-1149
  • Korayem, A. H., P. Ghasemi, and M. H. Korayem. 2019. “Vibration Analysis and Control of AFM Microcantilever Based on the MCS Theory Using the FSMC Control in the Air.” Arabian Journal for Science and Engineering Springer. March.2019. Vol.44, pp.7505–7514
  • Krylov, S., and Y. Bernstein. 2006. “Large Displacement Parallel Plate Electrostatic Actuator with Saturation Type Characteristic.” Sensors and Actuators 130-131: 497–512.
  • Krylov, S., and R. Maimon. 2004. “Pull-in Dynamics of an Elastic Beam Actuated by Continuously Distributed Electrostatic Force.” Journal of Vibration and Acoustics 126: 332–342.
  • Li, P., R. Hu, and Y. Fang. 2007. “A New Model for Squeeze-film Damping of Electrically Actuated Micro-beams under the Effect of A Static Deflection.” Journal of Micromechanics and Micro Engineering 17: 1242–1251.
  • Qiao, D., W. Yuan, and X. Li. 2007. “A Two-beam Method for Extending the Working Range of Electrostatic Parallel-plate Micro-actuators.” Journal of Electrostatics 65: 256–262.
  • Ramezani, A., A. Alasty, and J. Akbari. 2007. “Pull-in Parameters of Cantilever Type Nanomechanical Switches in Presence of Casimir Force.” Nonlinear Analysis: Hybrid Systems 1(03), September 2007, 364-382
  • Zhang, Y., and Y. Zhao. 2006. “Numerical and Analytical Study on the Pull-in Instability of Micro-structure under Electrostatic Loading.” Sensors and Actuators A 127: 366–380.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.