Design and testing of a compliant mechanism-based XYθ stage for micro/nanopositioning

References

• https://www.compliantmechanisms.byu.edu/about-compliant-mechanisms
   Google Scholar
• Bharanidaran, R., and T. Ramesh. 2014. “Numerical Simulation and Experimental Investigation of a Topologically Optimized Compliant Microgripper.” Sensors and Actuators. A, Physical 205: 156–163. doi:10.1016/j.sna.2013.11.011.
   Web of Science ®Google Scholar
• Dong, W., L. N. Sun, and Z. J. Du. 2007. “Design of a Precision Compliant Parallel Positioner Driven by Dual Piezoelectric Actuators.” Sensors and Actuators 135: 250–256. doi:10.1016/j.sna.2006.07.011.
   Web of Science ®Google Scholar
• Gu, G. Y., L. M. Zhu, C. Y. Su, Ding, H., and Fatikow, S. 2016. “Modeling and Control of Piezo- Actuated Nanopositioning Stages: A Survey.” IEEE Transactions on Automation Science and Engineering 13 (1): 313–332. doi:10.1109/TASE.2014.2352364.
   Web of Science ®Google Scholar
• Hao, G., and J. Yu. 2014. “A Completely Kinematostatically Decoupled XY Compliant Parallel Manipulator through New Topology Structure.” Proceedings of the IFToMM Workshop on Fundamental Issues and Future Research Directions for Parallel Mechanisms and Manipulators, Tianjin, China.
   Google Scholar
• Li, Y., and Q. Xu. 2006. “A Novel Design and Analysis of A 2-dof Compliant Parallel Micromanipulator for Nanomanipulation.” IEEE Transactions on Automation Science and Engineering 3 (3): 247–254. doi:10.1109/TASE.2006.875533.
   Web of Science ®Google Scholar
• Li, Y., and Q. Xu. 2009. “Design and Analysis of a Totally Decoupled Flexure-based Xy Parallel Micromanipulator.” IEEE Transaction on Robot. 25 (3): 645–657. doi:10.1109/TRO.2009.2014130.
   Web of Science ®Google Scholar
• Lin, S., Y. Jia, I. P., Lei, and Q. Xu. 2012. “Design and Optimization of a Long-stroke Compliant Micropositioning Stage Driven by Voice Coil Motor.” Proceeding of the 12th In- ternational Conference on Control Automation Robotics & Vision (ICARCV), 1716–1721,Guangzhou, China.
   Google Scholar
• Ling, M., J. Cao, Z. Jiang, and J. Lin. 2016. “Theoretical Modeling of Attenuated Displacement Amplification for Multistage Compliant Mechanism and Its Application.” Sensors and Actuators A Physical 249: 15–22. doi:10.1016/j.sna.2016.08.011.
   Web of Science ®Google Scholar
• Midha, A. 1994. “L. L. HowelL. A Method for the Design of Compliant Mechanisms with Small-length Flexural Pivots.” Transactions of the ASME 116: 280–290. doi:10.1115/1.2919359.
   Google Scholar
• Polit, S., and J. Dong. 2011. “Development of a High-bandwidth Xy Nanopositioning Stage for High-rate Micro-/nanomanufacturing.” IEEE/ASME Transactions on Mechatronics 16 (4): 724–733. doi:10.1109/TMECH.2010.2052107.
   Web of Science ®Google Scholar
• Qin, Y., B. Shirinzadeh, Y. Tian, D. Zhang, and U. Bhagat. 2014. “Design and Computational Optimization of a Decoupled 2-dof Monolithic Mechanism.” IEEE/ASME Transactions on Mechatronics 19 (3): 872–881. doi:10.1109/TMECH.2013.2262801.
   Web of Science ®Google Scholar
• Qin, Y., B. Shirinzadeh, D. Zhang, and Y. Tian. 2013. “Design and Kinematics Modeling of a Novel 3-dof Monolithic Manipulator Featuring Improved Scott-russell Mechanisms.” Journal of Mechanical Design 135 (10): 101004. doi:10.1115/1.4024979.
   Web of Science ®Google Scholar
• Ramadan, A., T. Takubo, Y. Mae, K. Oohara, and T. Arai. 2009. “Developmental Process of a Chopstick-like Hybrid-structure Two-fingered Micromanipulator Hand for 3-D Manipulation of Microscopic Objects.” IEEE Transactions on Industrial Electronics 56: 1121–1135. doi:10.1109/TIE.2008.2008753.
   Web of Science ®Google Scholar
• Ramesh, T., R. Bharanidaran, and V. Gopal. 2014. “Design and Development of XY Micro-Positioning Stage Using Modified Topology Optimization Technique.” Applied Mechanics and Materials 592–594: 2220–2224. d oi:10. 4028 /ww w.scie ntific. net/A MM.592 -594. 2220.
   Google Scholar
• Sun, X., W. Chen, Y. Tian, S. Fatikow, R. Zhou, J. Zhang, and M. Mikczinski. 2013. “A Novel Flexure-based Microgripper with Double Amplification Mechanisms for Micro/nano Manipulation.” Review of Scientific Instruments 84 (8): 085002. doi:10.1063/1.4817695.
   PubMed Web of Science ®Google Scholar
• Tian, Y., B. Shirinzadeh, D. Zhang, and G. Alici. 2009. “Development and Dynamic Modelling of a Flexure-based Scott–russell Mechanism for Nano-manipulation.” Mechanical Systems and Signal Processing 23 (3): 957–978. doi:10.1016/j.ymssp.2008.06.007.
   Web of Science ®Google Scholar
• Wang, H., and X. Zhang. 2008. “Input Coupling Analysis and Optimal Design of a 3-dof Compliant Micro-positioning Stage.” Mechanism and Machine Theory 43 (4): 400–410. doi:10.1016/j.mechmachtheory.2007.04.009.
   Web of Science ®Google Scholar
• Xu, Q., and Y. Li. 2011. “Analytical Modeling, Optimization and Testing of a Compound Bridge-type Compliant Displacement Amplifier.” Mechanism and Machine Theory 46 (2): 183–200. doi:10.1016/j.mechmachtheory.2010.09.007.
   Web of Science ®Google Scholar
• Yong, Y. K., S. S. Aphale, and S. R. Moheimani. 2009. “Design, Identification, and Control of a Flexure-Based Xy Stage for Fast Nanoscale Positioning.” IEEE Transaction on Nanotechnol 8 (1): 46–54. doi:10.1109/TNANO.2008.2005829.
   Web of Science ®Google Scholar
• Zhang, Y., K. K. Tan, and S. Huang. 2009. “Vision-servo System for Automated Cell Injection.” IEEE Transactions on Industrial Electronics 56: 231–238. doi:10.1109/TIE.2008.925771.
   Web of Science ®Google Scholar
• Zhu, W.-L., Z. Zhu, Y. Shi, X. Chen, Y. He, K. F. Ehmann, and B.-F. Ju. 2016a. “A Novel Piezoelectrically Actuated 2-dof Compliant Micro/nano-positioning Stage with Multi-level Amplification.” Review of Scientific Instruments 87 (10): 105006. doi:10.1063/1.4965880.
   PubMed Web of Science ®Google Scholar
• Zhu, W. L., Z. Zhu, Y. Shi, X. Wang, K. Guan, and B. F. Ju. 2016b. “Design, Modeling, Analysis and Testing of a Novel Piezo-actuated Xy Compliant Mechanism for Large Workspace Nano-Positioning.” Smart Materials and Structures 25 (11): 115033. doi:10.1088/0964-1726/25/11/115033.
   Web of Science ®Google Scholar
• Zhu, Z., X. Zhou, Z. Liu, R. Wang, and L. Zhu. 2014. “Development of a Piezoelectrically Actuated Two-degree-of-freedom Fast Tool Servo with Decoupled Motions for Micro-/nanomachining.” Precision Engineering 38 (4): 809–820. doi:10.1016/j.precisioneng.2014.04.009.
   Web of Science ®Google Scholar