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Original Articles

Reaction–diffusion approach to nanostructure formation during thin-film deposition

Pages 3829-3846 | Received 27 Jun 2002, Accepted 19 Feb 2003, Published online: 12 May 2010

References

  • Abraham , F. and White , G. 1970 . J. appl. Phys. , 41 : 1841
  • Baumann , F. , Chopp , D. , Diaz de la Rubia , T. , Gilmer , G. , Greene , J. , Huang , H. , Kodambaka , S. , O’Sullivan , P. and Petrov , I. 2001 . Mater. Res. Soc. Bull. , 26 : 182
  • Cale T. S. Mahadev V. 1996 Modeling of Film Deposition for Microelectronic Applications 22 New York Academic Press p. 175
  • De Groot S. Mazur P. 1984 Non-Equilibrium Thermodynamics New York Dover Publications
  • Gao , H. and Nix , W. 1999 . An. Rev. Mat. Sci. , 29 : 173
  • Ghoniem N. Heinisch H. Huang H. Kubin L. Yip S. Yu J. 1999 J. Comput. Aided Mater. Des. 6 (2 and 3) 374
  • Gilmer , G. H. and Bennema , P. 1972 . J. appl. Phys. , 43 : 1347
  • Hildebrand M. Mikhailov A. Ertl G. 1998 Phys. Rev. E 58 5483
  • Huang , H. , Gilmer , G. H. and Diaz de la Rubia , T. 1998 . J. appl. Phys. , 84 : 3636
  • Léonard F. Desai R. 1998 Phys. Rev. B 57 4805
  • Léonard F. Laradji M. Desai R. 1997 Phys. Rev. B 55 1887
  • Mehl M. Papaconstantopoulos D. 1996 Phys. Rev. B 54 4519
  • Mishin Y. Farkas D. Mehl M. Papaconstantopoulos D. 1999 Phys. Rev. B 59 3393
  • Suo Z. Lu W. 2000a J. Nanoparticle Res. 2 333 344 2000b,Multiscale Deformation and Fracture in Materials and Structures, The James R. Rice 60th Anniversary Volume edited by T.-J. Chuang and J. Rudnicki (Dordrecht: Kluwer), pp. 107–122
  • Verdasca J. Borckmans P. Dewel G. 1995 Phys. Rev. E 52 R4616
  • Vidal C. Dewel G. Borckmans P. 1994 Au-delá de l’Équilibre Paris Hermann
  • Walgraef D. 1996 Spatio-Temporal Pattern Formation (with examples in Physics, Chemistry and Materials Science New York Springer
  • Walgraef D. 2002 Physica E 15 33
  • Walgraef D. 2003 Physica E 18 393
  • Walgraef D. Clerc M. 2002 Coverage Evolution and Nanostructure Formation during Thin Film Deposition (preprint)
  • Walgraef D. Ghoniem N. Lauzeral J. 1997 Phys. Rev. B 56 15 361

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