62
Views
6
CrossRef citations to date
0
Altmetric
Original Articles

(001) silicon surfacial grain boundaries obtained by direct wafer bonding process: accurate control of the structure before bonding

, , , &
Pages 2415-2448 | Received 05 Sep 2004, Accepted 17 Jan 2005, Published online: 21 Feb 2007

References

References

  • Föll , H and Ast , D . 1979 . Phil. Mag. A , 40 : 589
  • Benamara , M , Rocher , A , Sopena , P , Claverie , A , Laporte , G , Saraboyrousse , G , Lescourzères , L and Peyrelavigue , A . 1996 . Mater. Sci. Engng. B , 42 : 164
  • Patriarche , G , Jeannès , F , Oudar , J-L and Glas , F . 1997 . J. Appl. Phys. , 82 : 4822
  • Fournel , F , Moriceau , H , Maguéa , N , Eymery , J , Rouvière , J-L , Rousseau , K and Aspar , B . 2000 . Mater. Sci. Engng. B , 73 : 42
  • Bruel , M . 1997 . World Patent , 905 ( No. 9 ) : 711
  • Bourret , A . 1999 . Surf. Sci. , 37 : 432
  • Romanov , AE , Petroff , PM and Speck , JS . 1999 . Appl. Phys. Lett. , 74 : 2280
  • Rousseau , K , Rouvière , J-L , Fournel , F and Moriceau , H . 2001 . Mater. Sci. Semic. Proc. , 4 : 101
  • Rousseau , K , Rouvière , J-L , Fournel , F and Moriceau , H . 2002 . Appl. Phys. Lett. , 80 : 4121
  • Rousseau K PhD thesis, Université Paris VI 2002
  • Wind , RA , Murtagh , MJ , Hines , A and Sass , SL . 2001 . Appl. Phys. Lett. , 78 : 2205
  • Buttard , D , Eymery , J , Fournel , F , Gentile , P , Leroy , F , Maguèa , N , Moriceau , H , Renaud , G , Rieutord , F , Rousseau , K and Rouvière , J-L . 2002 . IEEE J. Quant. Electron. , 38 : 995
  • Leroy , F , Eymery , J , Gentile , P and Fournel , F . 2002 . Appl. Phys. Lett. , 80 : 3078
  • Fournel , F , Rousseau , K , Moriceau , H , Eymery , J , Rouvière , J-L , Maguéa , N and Aspar , B . 2002 . Appl. Phys. Lett. , 80 : 793
  • Bollman W Crystal Defects and Crystalline Interfaces, Springer-Verlag 1970
  • Frank FC Report of the symposium on the Plastic Defromation of Crystalline Solids, Carnegie of Technology Pittsburgh 1950 p. 150
  • Bilby , B , Bullough , R and Smith , E . 1955 . Proc. R. Sco. A , 231 : 263
  • Christian IW The Thoery of Transformations in Metals and Alloys, Pergamon Oxford 1981 p. 322
  • Belov , AY , Scholz , R and Scheerschmidt , K . 1999 . Phil. Mag. Lett. , 79 : 531
  • Rouvière , J-L , Rousseau , K , Fournel , F and Moriceau , H . 2000 . Appl. Phys. Lett. , 77 : 1135
  • Amelinckx , S . 1956 . Phil. Mag. , 1 : 269
  • Frank FC MRS Bull. (March) 24 1988
  • Frank , FC . 1988 . Metall. Trns. , 19A : 403
  • Tanaka , M , Saito , R , Ueno , K and Harada , Y . 1980 . J. Electron. Microsc. , 29 : 408
  • Moruiroli , J-P , Leclerc , A , Swiatnicki , W and Laval , JY . 1993 . J. Phys. IV , 3 : 1455
  • Morniroli , J-P . 1997 . Interface Sci. , 4 : 273
  • Sutton AP Balluffi RW Interfaces in Crystalline Materials, Oxford Science Publications 1995 p. 22
  • Holy VF Pietsch U Baumbach T High Resolution X-ray Scattering from Thin Films and Multilayers, Springer Berlin 1999 p. 22
  • Eymery , J , Buttard , D , Fournel , F , Moriceau , H , Baumbach , G and Luebbert , D . 2002 . Phys. Rev. B , 65 : 65337

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.