References
- Trimmer , W . 1997 . Micromechanics and MEMS: Classic and Seminal papers to 1990 , New York : IEEE Press .
- Senturia , SD . 2000 . Microsystem Design , Boston : Kluwer Academic .
- Schweitz , JA . 1992 . MRS Bull. , 17 : 34
- Brotzen , FR . 1994 . Int. Mater. Rev. , 39 : 24
- Vinci , RP and Vlassak , JJ . 1996 . Annu. Rev. Mater. Sci. , 26 : 431
- Tregilgas , JH and Strumpell , M . 1998 . Microelectromechanical Structures for Materials Research , Edited by: Brown , S , Gilbert , J Guckel , H . Vol. 518 , 179 Pittsburgh, PA : Materials Research Society .
- Sharpe , WN Jr , LaVan , DA and Edwards , RL . 1997 . paper presented at Transducers 97 , 607 Piscataway, NJ : IEEE .
- Huang , H and Spaepen , F . 2000 . Acta Mater. , 48 : 3261
- Greek , S , Ericson , F Johansson , S . 1997 . Thin Solid Films , 292 : 247
- Small , MK and Nix , WD . 1992 . J. Mater. Sci. , 7 : 1553
- Catlin , A and Walker , WP . 1960 . J. Appl. Phys. , 31 : 2135
- Hill , R . 1950 . Phil. Mag. , 41 : 1133
- Brown , WF and Sachs , G . 1948 . Trans. ASME J. Eng. Mater. Technol. , 70 : 241
- Tsakalakos , T . 1981 . Thin Solid Films , 75 : 293
- Vlassak , JJ and Nix , WD . 1992 . J. Mater. Sci. , 7 : 3242
- Ziebart , V , Paul , O Munch , U . 1998 . J. MEMS , 7 : 320
- Maier-Schneider , D , Maibach , J and Obermeier E. , E . 1995 . J. MEMS , 4 : 238
- Weihs , TP , Hong , S Bravman , JC . 1988 . J. Mater. Res. , 3 : 931
- Zhang , TY , Su , YJ Qian , CF . 2000 . Acta Mater. , 48 : 2843
- Oliver , WC and Pharr , GM . 1992 . J. Mater. Res. , 7 : 1564
- Shen , YL , Williams , JJ Piotrowski , G . 2001 . Acta Mater. , 49 : 3219
- Lu , W and Komvopoulos , K . 2001 . J. Tibol. Trans. ASME , 123 : 717
- Vaidyanathan , R , Dao , M Ravichandran , G . 2001 . Acta Mater. , 49 : 3781
- Bahr , DF , Nibur , KA and Morasch , KR . 2002 . J. Elect. Mater. , 31 : 66
- Huber , N , Nix , WD and Gao , H . 2002 . Proc. R. Soc. Lond. A , 458 : 1593
- Cheng , YT , Li , ZY and Cheng , CM . 2002 . Phil. Mag. A , 10 : 1821
- Oyen , ML and Cook , RF . 2003 . J. Mater. Res. , 18 : 139
- Lilleodden , ET , Zimmerman , JA Foiles , SM . 2003 . J. Mech. Phy. Solids , 51 : 901
- Haque , MA and Saif , TA . 2003 . Acta Mater. , 51 : 3053
- Bhushan , B and Li , XD . 2003 . Int. Mater. Rev. , 48 : 125
- VanLandingham , MR . 2003 . J. Res. Natl. Inst. Std. Tech. , 108 : 249
- Volinsky , AA and Gerberich , WW . 2003 . Microelectron. Eng. , 69 : 519
- Lou , J , Shrotriya , P Buchheit , T . 2003 . J. Mater. Sci. , 38 : 4137
- Wei , YG and Hutchinson , JW . 2003 . J. Mech. Phy. Solids , 51 : 2037
- Mata , M and Alcala , J . 2004 . J. Mech. Phy. Solids , 52 : 145
- Xu , ZH and Rowcliffe , D . 2004 . Thin Solids Films , 447 : 399
- Borodich , FM and Keer , LM . 2004 . Int. J. Solids Struct. , 41 : 2479
- Giannakopoulos , AE , Larsson , PL and Vestergaard , R . 1994 . Int. J. Solids Struct. , 31 : 2679
- Larsson , PL , Giannakopoulos , AE Soderlund , E . 1996 . Int. J. Solids Struct. , 33 : 221
- Venkatesh , TA , Van Vliet , KJ Giannakopoulos , AE . 2000 . Scripta Mater. , 42 : 833
- Dao , M , Challacoop , N Van Vliet , KJ . 2001 . Acta Mater. , 49 : 3899
- Challacoop , N , Dao , M and Suresh , S . 2003 . Acta Mater. , 51 : 3713
- Wang , L , Ganor , M and Rokhlin , S . 2005 . J. Mater. Res. , 20 : 987
- Xu , ZH and Rowcliffe , DJ . 2002 . Phil Mag A , 82 : 1893
- Cao , YP and Lu , J . 2004 . Acta Mater. , 52 : 4023
- Cheng , YT and Cheng , CM . 1999 . J. Mater. Res. , 14 : 3493
- Tho , KK , Swaddiwudhipong , S Liu , ZS . 2004 . J. Mater. Res. , 19 : 2498
- Chen , X , Ogasawara , N Zhao , M . J. Mech. Phys. Solids doi:10.1016/j.jpms.2007.01.010 ,