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Part A: Materials Science

Contrast analysis of Shockley partial dislocations in 4H-SiC observed by synchrotron Berg–Barrett X-ray topography

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Pages 1674-1685 | Received 30 Mar 2013, Accepted 09 Feb 2014, Published online: 14 Apr 2014

References

  • M. Bhatnager and B.J. Baliga, IEEE Trans. Electron. Devices 40 (1993) p.645.
  • T. Ohno, H. Yamaguchi, S. Kuroda, K. Kojima, T. Suzuki and K. Arai, J. Cryst. Growth 260 (2004) p.209.
  • T. Ohno, H. Yamaguchi, S. Kuroda, K. Kojima, T. Suzuki and K. Arai, J. Cryst. Growth 271 (2004) p.1.
  • T. Ohyanagi, T. Ohno and A. Watanabe, Jpn. J. Appl. Phys. 43 (2004) p.9047.
  • T. Tsuji, T. Tawara, R. Tanuma, Y. Yonezawa, N. Iwamuro, K. Kosaka, H. Yurimoto, D. Kobayashi, H. Matsuhata, K. Fukuda, H. Okumura and K. Arai, Mater. Sci. Forum 645–648 (2010) p.913.
  • T. Suzuki, H. Yamaguchi, T. Hatakeyama, H. Matsuhata, J. Senzaki, K. Fukuda, T. Shinohe and H. Okumura, Mater. Sci. Forum 717–720 (2012) p.789.
  • H. Matsuhata, H. Yamaguchi and T. Ohno, Philos. Mag. 92 (2012) p.4599.
  • Semiconductor Equipment and Materials International Standard, M55-0308. See for example http://www.semi.org.
  • I.M. Serguei, P. Pirouz and T. Sudarashan, Appl. Phys. Lett. 87 (2005) p.033503.
  • A. Galeckas, J. Linnros, P. Pirouz, Phys. Rev. Lett. 96 (2006) p.025502.
  • S. Ha, M. Skowronski and H. Lendenmann, J. Appl. Phys. 96 (2004) p.393.
  • M. Skowronski, J.Q. Liu, W.M. Vetter, M. Dudley, C. Hallin and H. Lendenmann, J. Appl. Phys. 92 (2002) p.4699.
  • B. Chen, J. Chen, T. Sekiguchi, T. Ohyanagi, H. Matsuhata, A. Kinoshita and H. Okumura, J. Electron. Mater. 9 (2010) p.684.
  • B. Chen, T. Sekiguchi, T. Ohyanagi, H. Matsuhata, A. Kinoshita and H. Okumura, Phys. Rev. B 81 (2010) p.233203.
  • B. Chen, H. Matsuhata, T. Sekiguchi, A. Kinoshita, K. Inchinoseki and H. Okumura, Appl. Phys. Lett. 100 (2012) p.132108.
  • X. Zhang, M. Skowronski, K.X. Liu, R.E. Stahlbush, J.J. Sumakeris, M.J. Paisley and M.J. O’Loughlin, J. Appl. Phys. 102 (2007) p.093520.
  • N. Zhang, Y. Chen, Y. Zhang, M. Dudley and R.E. Stahlbush, Appl. Phys. Lett. 94 (2009) p.122108.
  • H. Matsuhata, H. Yamaguchi, I. Nagai, T. Ohno, R. Kosugi and A. Kinoshita, Mater. Sci. Forum 600–603 (2009) p.309.
  • Z. Zhang, M. Nagano and H. Tsuchida, Mat. Sci. Forum. 679–680 (2011) p.206.
  • M.H. Hong, A.V. Samant and P. Pirouz, Philos. Mag. A 80 (2000) p.919.
  • P. Pirouz, J.L. Demenet and M.H. Hong, Philos. Mag. A 81 (2001) p.1207.
  • G. Fang, J. Suda and T. Kimoto, Appl. Phys. Lett. 94 (2009) p.091910.
  • S. Izumi, H. Tsuchida, I. Kamata and T. Tawara, Appl. Phys. Lett. 86 (2005) p.202108.
  • G. Fang, J. Suda and T. Kimoto, Appl. Phys. Lett. 92 (2008) p.221906.

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