266
Views
4
CrossRef citations to date
0
Altmetric
Measurement Methods

Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass

, , , , , , & show all
Pages 1967-1981 | Received 14 Nov 2013, Accepted 03 Apr 2014, Published online: 13 May 2014

References

  • Q. Ma, H. Fujimoto, P. Flinn, V. Jain, F. Adibi-Rizi, F. Moghadam, R.H. Dauskardt, Mat. Res. Soc. Symp. Proc. 391 (1995) p.91.
  • Q. Ma, J. Bumgarner, H. Fujimoto, M. Lane, R.H. Dauskardt. Adhesion measurement of interfaces in multilayer interconnect structures, in Materials Research Society symposia proceedings, San Francisco, CA, vol. 473, 1997.
  • R.H. Dauskardt, M. Lane, Q. Ma and N. Krishna, Eng. Fract. Mech. 61 (1998) p.141.10.1016/S0013-7944(98)00052-6
  • A. Kinbara, S. Baba, A. Kikuchi, T. Kajiwara and K. Watanabe, Thin Solid Films 171 (1989) p.93.10.1016/0040-6090(89)90036-9
  • M. Lane, R.H. Dauskardt, N. Krishna and I. Hashim, J. Mater. Res. 15 (2000) p.203.10.1557/JMR.2000.0033
  • S. Varchenya, A. Simanovskis and S. Stolyarova, Thin Solid Films 164 (1988) p.147.10.1016/0040-6090(88)90125-3
  • S.A. Rafalski, R.L. Spreitzer, S.W. Russell, T.L. Alford, J. Li, M. Moinpour, F. Moghadam, J.W. Mayer, Enhanced adhesion of copper films to SiO2, PSG and BPSG by refractory metal additions, in Materials Research Society symposia proceedings, San Francisco, CA, vol. 337, 1994.
  • J.E.E. Baglin, Nucl. Instrum. Methods Phys. Res., Sect. B 65 (1992) p.119.10.1016/0168-583X(92)95024-L
  • S.W. Russell, S.A. Rafalski, R.L. Spreitzer, J. Li, M. Moinpour, F. Moghadam and T.L. Alford, Thin Solid Films 262 (1995) p.154.10.1016/0040-6090(94)05812-1
  • M.D. Kriese, N.R. Moody and W.W. Gerberich, Acta Mater. 46 (1998) p.6623.10.1016/S1359-6454(98)00277-8
  • G. Dehm, M. Rühle, H.D. Conway and R. Raj, Acta Mater. 45 (1997) p.489.10.1016/S1359-6454(96)00213-3
  • J. Cunningham, C. Fuller, C. Haywood, IEEE Trans. Reliab. R-19 (1970) p.182.10.1109/TR.1970.5216441
  • P.B. Ghate, J.C. Blair, C.R. Fuller, G.E. McGuire, Thin Solid Films Paper Presented International Conference on Metallurgical Coatings San Francisco, CA, 3–7 April, 1978, San Francisco, CA, vol. 53, p.117.
  • C.Y. Ting and M. Wittmer, Thin Solid Films 96 (1982) p.327.10.1016/0040-6090(82)90516-8
  • S.D. McAdams, T.Y. Tsui, W.C. Oliver, G.M. Pharr, Effects of Interlayers on the Scratch Adhesion Performance of Ultra-thin Films of Copper and Gold on Silicon Substrates, in. MRS Proceedings, Boston, MA, vol. 356, 1994.
  • K. Matoy, T. Detzel, M. Müller, C. Motz and G. Dehm, Surf. Coat. Technol. 204 (2009) p.878.10.1016/j.surfcoat.2009.09.013
  • P.G. Charalambides, J. Lund, A.G. Evans and R.M. McMeeking, J. Appl. Mech. 56 (1989) p.77.10.1115/1.3176069
  • M.P. De Boer, M. Kriese and W.W. Gerberich, J. Mater. Res. 12 (1997) p.2673.10.1557/JMR.1997.0357
  • A. Bagchi, G. Lucas, Z. Suo and A. Evans, J. Mater. Res. 9 (1994) p.1734.10.1557/JMR.1994.1734
  • O. Jørgensen, A. Horsewell and B.F. Sørensen, J. Mater. Res. 11 (1996) p.2109.10.1557/JMR.1996.0266
  • D.B. Marshall and A.G. Evans, J. Appl. Phys. 56 (1984) p.2632.10.1063/1.333794
  • M.D. Kriese, W.W. Gerberich and N.R. Moody, J. Mater. Res. 14 (1999) p.3007.10.1557/JMR.1999.0404
  • E. Barthel, O. Kerjan, P. Nael and N. Nadaud, Thin Solid Films 473 (2005) p.272.10.1016/j.tsf.2004.08.017
  • A.A. Volinsky, N.R. Moody and W.W. Gerberich, Acta Mater. 50 (2002) p.441.10.1016/S1359-6454(01)00354-8
  • R. Shaviv, S. Roham and P. Woytowitz, Microelectron. Eng. 82 (2005) p.99.10.1016/j.mee.2005.06.006
  • R.P. Birringer, P.J. Chidester and R.H. Dauskardt, Eng. Fract. Mech. 78 (2011) p.2390.10.1016/j.engfracmech.2011.05.010
  • J.J. Wortman and R.A. Evans, J. Appl. Phys. 36 (1965) p.153.10.1063/1.1713863
  • J.A.S. Ikeda, Y.-M. Chiang, A.J. Garratt-Reed and J.B.V. Sande, J. Am. Ceram. Soc. 76 (1993) p.2447.10.1111/jace.1993.76.issue-10
  • C. Scheu, J. Microscopy 207 (2002) p.52.10.1046/j.1365-2818.2002.01036.x
  • J. Yang, C. Wang, K. Tao and Y. Fan, J. Vac. Sci. Technol., A 13 (1995) p.481.10.1116/1.579383
  • S.V. Nagender Naidu and P. Rama Rao (ed.), Phase Diagrams of Binary Tungsten Alloys, The Indian Institute of Metal, Kolkata, 1991.
  • L. Kaufman and H. Nesor, Metall. Trans. A 6 (1975) p.2123.10.1007/BF03161839
  • S. Petrović, N. Bundaleski, D. Peruško, M. Radović, J. Kovač, M. Mitrić, B. Gaković and Z. Rakočević, Appl. Surf. Sci. 253 (2007) p.5196.10.1016/j.apsusc.2006.10.077
  • Collaboration: Scientific Group Thermodata Europe (SGTE), Thermodynamic properties of compounds, SbO2 to Rh2O3, in Pure Subst. Part 4 Compd. HgHg ZnTeg, Lehrstuhl für Theoretische Hüttenkunde, Rheinisch-Westfälische Technische Hochschule Aachen, eds., vol. 19A4, Springer-Verlag, Berlin, p. 304,312.
  • E. Nussbaum, H. Meltzman and W.D. Kaplan, J. Mat. Sci. 47 (2012) p.1647.10.1007/s10853-011-5707-1
  • M. Kottke, J. Vac. Sci. Technol., B 10 (1992) p.1124.10.1116/1.586088
  • A.G. Thorsness and A.J. Muscat, J. Electrochem. Soc. 150 (2003) p.F219.10.1149/1.1623767

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.