Advanced search
Publication Cover
Philosophical Magazine Volume 103, 2023 - Issue 14
Submit an article Journal homepage
119
Views
1
CrossRef citations to date
0
Altmetric
Part A: Materials Science

Whereabouts of missing atoms in a laser-injected Si (Part III)

Hiroyasu Sakaa Research Institute for Industrial Technology, Aichi Institute of Technology, Toyota, JapanCorrespondence[email protected]
View further author information
,
Hiroyuki Iwatab Department of Electric Engineering, Aichi Institute of Technology, Toyota, JapanView further author information
&
Makoto Takagic Department of Mechanical Engineering, Aichi Institute of Technology, Toyota, JapanView further author information
Pages 1345-1359 | Received 04 Dec 2022, Accepted 24 Apr 2023, Published online: 18 May 2023

References

  • E. Ohmura, F. Fukuyo, K. Fukumitsu, and H. Morita, Internal modified-layer formation mechanism into silicon with nanosecond laser. J. Arch. Mater. Manuf. Eng. 17 (2006), pp. 381–384.
  • K. Shimamura, J. Okuma, S. Ohmura, and F. Shimojo, Molecular-dynamics study of void-formation inside silicon wafers in stealth dicing. J. Phys.: Conf. Ser. 402 (2012), p. 012044.
  • P.C. Verburg, L.A. Smillie, G.R.B.E. Römer, l.B. Haberi, J.E. Bradby, J.S. Williams, I. Huis, and A.J. Veld, Crystal structure of laser-induced subsurface modifications in Si. Appl. Phys. A 120 (2015), pp. 683–691.
  • H. Iwata, D. Kawaguchi, and H. Saka, Electron microscopy of voids in Si formed by permeable laser injection. Microscopy. 66 (2017), pp. 328–336.
  • H. Iwata, D. Kawaguchi, and H. Saka, Crystal structures of high-pressure phases c formed in Si formed by laser injection. Microscopy. 67 (2017), pp. 30–36.
  • H. Saka, H. Iwata, and D. Kawaguchi, Thermal stability of laser-induced modified volume in Si as studied by in-situ and ex-situ heating experiments. Microscopy. 66 (2017), pp. 328–336.
  • D. Kawaguchi, H. Iwata, and H. Saka, Whereabouts of missing atoms in a laser-injected Si (Part 1). Philos. Mag. 99 (2019), pp. 1849–1865.
  • K. Kiyota, K. Hara, M. Jankowski, and M.M. Fejer, Numerical simulation and validation of subsurface modification and crack formation induced by nanosecond-pulsed laser processing in monocrystalline silicon. J. Appl. Phys. 127 (2020), p. 085106. doi:10.1063/1.5130701.
  • E. Ohmura, I.M. Kumaga, K. Fukumitsu, M. Nakano, N. Uchiyama, and H. Morita, Internal modification of ultra thin silicon wafer by permeable pules laser [in Japanese] Seimitsu Kougakkaishi. J. Jpn. Soc. Prec. Eng. 74 (2008), pp. 275–281.
  • H. Saka and H. Iwata, Whereabouts of missing atoms in a laser-injected Si (Part II) precision mass measurement of a laser-injected Si wafer and re-examination by transmission electron microscopy. Annu. Rep. Nagoya Univ. HVEM Group: Progr. Electro-Optics Res. Nagoya Univ. 32 (2021), pp. 18–26.
  • W.C. Dash, Dislocations and Mechanical Properties of Crystals, Wiley, New York, 1957.
  • H. Sakane. Metallurgy IV: The World Through the Electron Microscope, 1968 JEOL, compiled by S. Koda.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.