355
Views
9
CrossRef citations to date
0
Altmetric
Original Articles

Nanometric positioning accuracy in the presence of presliding and sliding friction: Modelling, identification and compensation

&
Pages 111-126 | Received 27 Oct 2015, Accepted 29 Jan 2016, Published online: 22 Apr 2016

References

  • Al-Bender, F., Lampaert, V., Swevers, J. (2004). Modeling of dry sliding friction dynamics: From heuristic models to physically motivated models and back. Chaos: An Interdisciplinary Journal of Nonlinear Science 14(2):446–460. doi:10.1063/1.1741752
  • Al-Bender, F., Lampaert, V., Swevers, J. (2005). The generalized Maxwell-slip model: A novel model for friction simulation and compensation. IEEE Transactions on Automatic Control 50(11):1883–1887. doi:10.1109/tac.2005.858676
  • Armstrong-Helouvry, B., Dupont, P., de Wit, C. C. (1994). A survey of models, analysis tools and compensation methods for the control of machines with friction. Automatica 30(7):1083–1138. doi:10.1016/0005-1098(94)90209-7
  • Astrom, K. J., Hagglund, T. (1995). PID Controllers: Theory, Design and Tuning. 2nd ed. Research Triangle Park, NC: Instrument Society of America.
  • Bhushan, B. (Ed.). (2010). Springer Handbook of Nanotechnology. 3rd ed. Berlin: Springer.
  • Courtney-Pratt, J. S., Eisner, E. (1957). The effect of a tangential force on the contact of metallic bodies. Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences 238(1215):529–550. doi:10.1098/rspa.1957.0016
  • Dahl, P. R. (1968). A solid friction model. Technical report Contract No. AF04695-67-C-0158, Los Angeles, CA: Aerospace Corporation.
  • De Wit, C. C., Olsson, H., Astrom, K. J., Lischinsky, P. (1995). A new model for control of systems with friction. IEEE Transactions on Automatic Control 40(3):419–425. doi:10.1109/9.376053
  • Hassani, V., Tjahjowidodo, T., Do, T. N. (2014). A survey on hysteresis modeling, identification and control. Mechanical Systems and Signal Processing 49(1–2):209–233. doi:10.1016/j.ymssp.2014.04.012
  • Hsieh, C., Pan, Y. C. (2000). Dynamic behavior and modelling of the pre-sliding static friction. Wear 242(1–2):1–17.
  • Jamaludin, Z. (2008). Disturbance compensation for machine tools with linear motor drives. Doctoral thesis, Katholieke Universiteit, Leuven, Belgium.
  • Lampaert, V., Swevers, J., Al-Bender, F. (2004). Comparison of model and non-model based friction compensation techniques in the neighbourhood of pre-sliding friction. In Proc American Control Conf, Boston, USA, vol. 2, 1121–1126.
  • Lin, F., Brandt, R. D., Saikalis, G. (2000). Self-tuning of PID controllers by adaptive interaction. In: Proc Am Contr Conf. Chicago, USA, vol. 5, pp. 3676–3681.
  • Liu, L., Wu, Z., Liu, H. (2013). Modeling and analysis of the crossfeed servo system of a heavy-duty lathe with friction. Mechanics Based Design of Structures and Machines 41(1):1–20. doi:10.1080/15397734.2012.675873
  • McKeown, P., Corbett, J. (2004). Ultra precision machine tools. In: Klocke, F. Pritschow, G. eds. Autonome produktion, Berlin: Springer, pp. 313–327.
  • Schmidt, R. M., Schitter, G., Rankers, A., van Eijk, J. (2014). The Design of High Performance Mechatronics – High-Tech Functionality by Multidisciplinary System Integration (2nd ed.). Delft: U Press.
  • Shore, P., Cunningham, C., DeBra, D., Evans, C., Hough, J., Gilmozzi, R., Kunzmann, H., Morantz, P., Tonnellier, X. (2010). Precision engineering for astronomy and gravity science. CIRP Annals - Manufacturing Technology 59(2):694–716.
  • Swevers, J., Al-Bender, F., Ganseman, C. G., Projogo, T. (2000). An integrated friction model structure with improved presliding behavior for accurate friction compensation. IEEE Transactions on Automatic Control 45(4):675–686. doi:10.1109/9.847103
  • Tjahjowidodo, T., Al-Bender, F., Van Brussel, H. (2005). Friction Identification and Compensation in a DC Motor. In: Proc 16th IFAC World Cong. (paper 4017). Prague, CZ.
  • Worden, K., Wong, C. X., Parlitz, U., Hornstein, A., Engster, D., Tjahjowidodo, T., Al-Bender, F., Rizos, D. D., Fassois, S. D. (2007). Identification of pre-sliding and sliding friction dynamics: Grey box and black-box models. Mechanical Systems and Signal Processing 21:514–534. doi:10.1016/j.ymssp.2005.09.004
  • Wu, Z. Y., Dowell, E. H., Tang, D. M. (2014). Damping analysis in beams subject to presliding friction. Mechanics Based Design of Structures and Machines 42(2):229–243.
  • Yoon, J. Y., Trumper, D. L. (2014). Friction modeling, identification, and compensation based on friction hysteresis and Dahl resonance. Mechatronics 24(6):734–741. doi:10.1016/j.mechatronics.2014.02.006
  • Zelenika, S., De Bona, F. (2009). Nano-positioning using an adaptive pulse width approach. Proceedings of the Institution of Mechanical Engineers 223(8):1955–1963. doi:10.1243/09544062jmes1489

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.