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Molecular Crystals and Liquid Crystals Volume 470, 2007 - Issue 1
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Original Articles

Development of Slit Coating Photoresist with High Coating Speed Property

Shuichi Takahashi Department of Applied Chemistry & Biochemistry Faculty of Engineering, Kumamoto University, Kurokami, Kumamoto-shi, Kumamoto, JapanCorrespondence[email protected]
,
Shunji Kawato Department of Applied Chemistry & Biochemistry Faculty of Engineering, Kumamoto University, Kurokami, Kumamoto-shi, Kumamoto, Japan
,
Junichi Shimakura Department of Applied Chemistry & Biochemistry Faculty of Engineering, Kumamoto University, Kurokami, Kumamoto-shi, Kumamoto, Japan
&
Seiji Kurihara Department of Applied Chemistry & Biochemistry Faculty of Engineering, Kumamoto University, Kurokami, Kumamoto-shi, Kumamoto, Japan
Pages 57-62 | Published online: 22 Sep 2010

REFERENCES

  • Kawato , S. & Takahashi , S. ( 2001 ). 47th Meeting for presenting research papers about polymer , p. 86.
  • Takahashi , S. , Zhang , Y. , Mochida , K. , Ogata , T. , & Kurihara , S. ( 2005 ). IDW/AD 2005 , 1295 – 1298 .

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