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Departments

Case Study

Hazard Identification of Powder Generated from a Chemical Vapor Deposition Process in the Semiconductor Manufacturing Industry

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Pages D1-D5 | Published online: 06 Nov 2012

REFERENCES

  • Chepesiuk , R. 1999 . Where the chips fall: Environmental health in the semiconductor industry . Environ. Health Perspect. , 107 ( 9 ) : A452 – A457 .
  • Boice , J. D. Jr. , Marano , D. E. Munro , H. M. 2010 . Cancer mortality among US workers employed in semiconductor wafer fabrication . J. Occup. Environ. Med. , 52 ( 11 ) : 1082 – 1097 .
  • McElvenny , D. M. , Darnton , A. J. , Hodgson , J. T. , Clarke , S. D. , Elliott , R. C. and Osman , J. 2003 . Investigation of cancer incidence and mortality at a Scottish semiconductor manufacturing facility . Occup. Med. , 53 : 419 – 430 .
  • Beall , C. , Bender , T. J. Cheng , H. 2005 . Mortality among semiconductor and storage device-manufacturing workers . J. Occup. Environ. Med. , 47 ( 10 ) : 996 – 1014 .
  • May , G. S. and Spanos , C. J. 2006 . Fundamentals of Semiconductor Manufacturing and Process Control , 25 – 81 . Hoboken , N.J. : John Wiley & Sons, Inc .
  • McGuire , G. E. 1988 . Semiconductor Materials and Process Technology Handbook , Park Ridge , N.J. : Noyes Publications .
  • Saito , M. , Kudoh , Y. and Homma , Y. 1995 . “ Pressure-controlled two-step TEOS-O3 CVD eliminating the base material effect ” . In Digest of Technical Papers. Symposium on VLSI Technology 1995 Vol. 4B-2 , 43 – 44 .
  • Kim , H. U. and Rhee , S. W. 2000 . Electrical properties of bulk silicon dioxide and SiO2/Si interface formed by tetraethylorthosilicate-ozone chemical vapor deposition . J. Electrochem. Soc. , 147 ( 4 ) : 1473 – 1476 .
  • Schulte , P. , Geraci , C. , Zumwalde , R. , Hoover , M. and Kuempel , E. 2008 . Occupational risk management of engineered nanoparticles . J. Occup. Environ. Hyg. , 5 : 239 – 249 .
  • Oberdörster , G. , Oberdörster , E. and Oberdörster , J. 2005 . Nanotoxicology: An emerging discipline evolving from studies of ultrafine particles . Environ. Health Perspect. , 113 ( 7 ) : 823 – 839 .
  • Meng , H. , Chen , Z. Xing , G. 2007 . Ultrahigh reactivity provokes nanotoxocity: Explanation of oral toxicity of nano-copper particles . Toxicol. Lett. , 175 : 102 – 110 .
  • Suh , W. H. , Suslick , K. S. , Stucky , G. D. and Suh , Y. H. 2009 . Nanotechnology, nanotoxicology, and neuroscience . Prog. Neurobiol. , 87 : 133 – 170 .
  • Kelly , R. J. 2009 . Occupational medicine implications of engineered nanoscale particulate matter . J. Chem. Health Safety. , 16 ( 1 ) : 24 – 39 .
  • Shatkin , J. A. 2008 . Nanotechnology: Health and Environmental Risks , Boca Raton , Fla : CRC Press Taylor & Francis Group .
  • Cullity , B. D. 1978 . “ Second Ed. ” . In Elements of X-Ray Diffraction , Boston , Mass : Addison-Wesley .
  • National Institute for Occupational Safety and Health (NIOSH) . 2003 . “ Silica, Crystalline, by XRD: Method 7500. ” . In NIOSH Manual of Analytical Methods (NMAM) Fourth Ed. Issue 4
  • Bhaskar , R. , Li , J. and Xu , L. 1994 . A comparative study of particle size dependency of IR and XRD methods for quartz analysis . Am. Ind. Hyg. Assoc. J. , 55 : 605 – 609 .
  • Merget , R. , Bauer , T. , Küpper , H. U. and Philippou , S. 2002 . Health hazards due to the inhalation of amorphous silica . Arch. Toxicol. , 75 : 625 – 634 .
  • Johnston , C. J. , Driscoll , K. E. Finkelstein , J. N. 2000 . Pulmonary chemokine and mutagenic responses in rats after subchronic inhalation of amorphous and crystalline silica . Toxicol. Sci. , 56 : 405 – 413 .
  • Parks , C. G. , Conrad , K. and Cooper , G. S. 1999 . Occupational exposure to crystalline silica and autoimmune disease . Environ. Health Perspect. , 107 ( Suppl. 5 ) : 793 – 802 .
  • Mossman , B. T. and Churg , A. 1998 . Mechanisms in the pathogenesis of asbestosis and silicosis . Am. J. Respir. Crit. Care Med. , 157 : 1666 – 1680 .
  • Arts , J. H. , Muijser , H. , Duistermaat , E. , Junker , K. and Kuper , C. F. 2007 . Five-day inhalation toxicity study of three types of systhetic amorphous silicas in Wistar rats and post-exposure evaluations for up to 3 months . Food Chem. Toxicol. , 45 : 1856 – 1867 .
  • Warheit , D. B. , McHugh , T. A. and Hartsky , M. A. 1995 . Differential pulmonary responses in rats inhaling crystalline, colloidal or amorphous silica dusts . Scand J. Work Environ. Health , 21 ( Suppl. 2 ) : 19 – 21 .
  • Costantini , L. M. , Gilberti , R. M. and Knecht , D. A. 2011 . The phagocytosis and toxicity of amorphous silica . PLos One , 6 ( 2 ) : e14647

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