Exposure Characteristics of Nanoparticles as Process By-products for the Semiconductor Manufacturing Industry

REFERENCES

• Roco, M. C. (ed): Nanotechnology: Shaping the World Atom by Atom. National Science and Technology Council, the Interagency Working Group on Nanoscience, Engineering, and Technology, Washington, D.C., 1999.
   Google Scholar
• Johnson, S.R., S.D. Evans, and R. Brydson Influence of a terminal functionality on the physical properties of surfactant-stabilized gold nanoparticles. Langmuir 14:6639–6647 (1998).
   Web of Science ®Google Scholar
• Wiechers, J.W., and N. Musee Engineered inorganic nanoparticles and cosmetics: Facts, issues, knowledge gaps and challenges. J. Biomed. Nanotechnol. 6:408–431 (2010).
   PubMed Web of Science ®Google Scholar
• Zhang, L., F.X. Gu, J.M. Chan, A.Z. Wang, R.S. Langer, and O.C., Farokhzad Nanoparticles in medicine: Therapeutic applications and developments. Clin. Pharmacol. Ther. 83:761–769 (2008).
   PubMed Web of Science ®Google Scholar
• Müller-Goymann C.C.: Physicochemical characterization of colloidal drug delivery systems such as reverse micelles, vesicles, liquid crystals and nanoparticles for topical administration. Eur. J. Pharm. Biopharm. 58:343–356 (2004).
   PubMed Web of Science ®Google Scholar
• Chen, W., J.Z. Zhang, and A.G. Joly: Optical properties and potential applications of doped semiconductor nanoparticles. J. Nanosci. Nanotechnol. 4(8:919–947 (2004).
   PubMed Web of Science ®Google Scholar
• Biju, V., T. Itoh, A. Anas, A. Sujith, and M. Ishikawa: Semiconductor quantum dots and metal nanoparticles: syntheses, optical properties, and biological applications. Anal. Bioanal. Chem. 391(7):2469–2495 (2008).
   PubMed Web of Science ®Google Scholar
• Goya, G.F., T.S. Berquo, F.C. Fonseca, and M.P. Morales: Static and dynamic magnetic properties of spherical magnetite nanoparticle. J. Appl. Phys. 94(5):3520–3528 (2003).
   Web of Science ®Google Scholar
• Choi, K.M., T. Akita, T. Mizugaki, K. Ebitani, and K. Kaneda: Highly selective oxidation of allylic alcohols catalysed by monodispersed 8-shell Pd nanoclusters in the presence of molecular oxygen. New J. Chem. 27:324–328 (2003).
   Web of Science ®Google Scholar
• Oberdörster, G., E. Oberdörster, and J. Oberdörster: Nanotoxicology: An emerging discipline evolving from studies of ultrafine particles. Environ. Health Perspect. 113(7):823–839 (2005).
   PubMed Web of Science ®Google Scholar
• Maynard, A.D.: Nanotechnology: The next big thing, or much ado about nothing? Ann. Occup. Hyg. 51(1):1–12 (2007).
   PubMed Web of Science ®Google Scholar
• Hoet, P.H., I.B. Hohlfeld, and O.V. Salata: Nanoparticles – known and unknown health risks. J. Nanobiotechnol. 2(12):1–15 (2004).
   PubMedGoogle Scholar
• Schulte, P., C. Geraci, R. Zumwalde, M. Hoover, and E. Kuempel: Occupational risk management of engineered nanoparticles. J. Occup. Environ. Hyg. 5(4):239–249 (2008).
   PubMed Web of Science ®Google Scholar
• Lee, J.H., M. Kwon, J.H. Ji: Exposure assessment of workplaces manufacturing nanosized TiO2 and silver. Inhal. Toxicol. 23(4):226–236 (2011).
   PubMed Web of Science ®Google Scholar
• International Agency for Research on Cancer (IARC): Titanium Dioxide (TiO2), IARC Monographs on the evaluation of carcinogenic risks to humans. Vol 12. IARC Press, 1993.
   Google Scholar
• Merget, R., T. Bauer, H.U. Küpper, and S. Philippou: Health hazards due to the inhalation of amorphous silica. Arch. Toxicol. 75:625–634 (2002).
   PubMed Web of Science ®Google Scholar
• Johnston, C.J., K.E. Driscoll, J.N. Finkelstein: Pulmonary chemokine and mutagenic responses in rats after subchronic inhalation of amorphous and crystalline silica. Toxicol. Sci. 56:405–413 (2000).
   PubMed Web of Science ®Google Scholar
• Parks, C.G., K. Conrad, and G.S. Cooper: Occupational exposure to crystalline silica and autoimmune disease. Environ. Health Perspect. 107(Suppl. 5):793–802 (1999).
   PubMed Web of Science ®Google Scholar
• Mossman, B.T., and A. Churg: Mechanisms in the pathogenesis of asbestosis and silicosis. Am. J. Respir. Crit. Care Med. 157:1666–1680 (1998).
   PubMed Web of Science ®Google Scholar
• Arts, J.H., H. Muijser, E. Duistermaat, K. Junker, and C.F. Kuper: Five-day inhalation toxicity study of three types of synthetic amorphous silicas in Wistar rats and post-exposure evaluations for up to 3 months. Food Chem. Toxicol. 45:1856–1867 (2007).
   PubMed Web of Science ®Google Scholar
• Warheit, D.B., T.A. McHugh, and M.A. Hartsky: Differential pulmonary responses in rats inhaling crystalline, colloidal or amorphous silica dusts. Scand J. Work Environ. Health 21(Suppl.2):19–21 (1995).
   PubMed Web of Science ®Google Scholar
• Whyte, W.: Cleanroom Technology - Fundamentals of Design, Testing and Operation. Chichester, U.K.: John Wiley & Sons, Inc., 2001. Chapter 1, pp. 1–8.
   Google Scholar
• Choi, K.M., T.H. Kim, K.S. Kim, and S.G. Kim: Hazard identification of powder generated from a chemical vapor deposition process in the semiconductor manufacturing industry. J. Occup. Environ. Hyg. 10(1):D1–D5 (2013).
   PubMed Web of Science ®Google Scholar
• Choi, K.M., H.C. An, and K.S. Kim: Identifying the hazard characteristics of powder by-products generated semiconductor fabrication processes. J. Occup. Environ. Hyg. 12(2):114–122 (2015).
   Google Scholar
• Kumar, C. (ed.) : Nanomaterials – Toxicity, Health and Environmental Issues, Nanotechnologies for the Life Sciences Volume 5. Weinheim, Baden-Württemberg, Germany: Wiley-VCH, 2006. pp. 86–87.
   Google Scholar
• Sayes, C.M., R. Wahi, P.A. Kurian: Correlating nanoscale titania structure with toxicity: A cytotoxicity and inflammatory response study with human dermal fibroblasts and human lung epithelial cells. Toxicol. Sci. 92(1):174–185 (2006).
   PubMed Web of Science ®Google Scholar