Thermomechanical Sensitivity of Microcantilevers in the Mid-Infrared Spectral Region

REFERENCES

• Shen , S. , Narayanaswamy , A. and Chen , G. 2009 . Surface Phonon Polaritons Mediated Energy Transfer between Nanoscale Gaps . Nano Letters , 9 : 2909
   PubMed Web of Science ®Google Scholar
• De Wilde , Y. , Formanek , F. , Carminati , R. , Gralak , B. , Lemoine , P.A. , Joulain , K. , Mulet , J.P. , Chen , Y. and Greffet , J.J. 2006 . Thermal Radiation Scanning Tunnelling Microscopy . Nature , 444 : 740
   PubMed Web of Science ®Google Scholar
• Barnes , J.R. , Stephenson , R.J. , Woodburn , C.N. , Oshea , S.J. , Welland , M.E. , Rayment , T. , Gimzewski , J.K. and Gerber , C. 1994 . A Femtojoule Calorimeter Using Micro mechanical Sensors . Review of Scientific Instruments , 65 : 3793
   Google Scholar
• Varesi , J. , Lai , J. , Perazzo , T. , Shi , Z. and Majumdar , A. 1997 . Photothermal Measurements at Picowatt Resolution Using Uncooled Micro–Optomechanical Sensors . Applied Physics Letters , 71 : 306
   Google Scholar
• Wig , A. , Arakawa , E.T , Passian , A. , Ferrell , T.L. and Thundat , T. 2006 . Photothermal Spectroscopy of Bacillus Anthracis and Bacillus Cereus with Microcantilevers . Sensors and Actuators B: Chemical , 114 : 206
   Google Scholar
• Arakawa , E.T. , Lavrik , N.V. and Datskos , P.G. 2003 . Detection of Antrax Simulants with Microcalorimetric Spectroscopy: Bacillus Subtilis and Bacillus Cereus Spores . Applied Optics , 42 : 1757
   PubMedGoogle Scholar
• Van Neste , C.W. , Senesac , L.R. , Yi , D. and Thundat , T. 2008 . Standoff Detection of Explosive Residues Using Photothermal Microcantilevers . Applied Physics Letters , 92 : 134102
   Google Scholar
• Arakawa , E.T. , Lavrik , N.V. , Rajic , S. and Datskos , P.G. 2003 . Detection and Differentiation of Biological Species Using Microcalorimetric Spectroscopy . Ultramicroscopy , 97 : 459
   PubMedGoogle Scholar
• Datskos , P.G. , Sepaniak , M.J. , Tipple , C.A. and Lavrik , N. 2001 . Photomechanical Chemical Microsensors . Sensors and Actuators B: Chemical , 76 : 393
   Google Scholar
• Krause , A.R. , Van Neste , C. , Senesac , L. , Thundat , T. and Finot , E. 2008 . Trace Explosive Detection Using Photothermal Deflection Spectroscopy . Journal of Applied Physics , 103 : 094906
   Google Scholar
• Levin , I.W. and Bhargava , R. 2005 . Fourier Transform Infrared Vibrational Spectroscopic Imaging: Integrating Microscopy and Molecular Recognition . Annual Review of Physical Chemistry , 56 : 429
   PubMed Web of Science ®Google Scholar
• Datskos , P.G. , Lavrik , N.V. and Rajic , S. 2004 . Performance of Uncooled Microcantilever Thermal Detectors . Review of Scientific Instruments , 75 : 1134
   Google Scholar
• Butt , H.J. and Jaschke , M. 1995 . Calculation of Thermal Noise in Atomic Force Microscopy . Nanotechnology , 6 : 1 – 7 .
   Web of Science ®Google Scholar
• Lai , J. , Perazzo , T. , Shi , Z. and Majumdar , A. 1997 . Optimization and Performance of High–Resolution Micro–Optomechanical Thermal Sensors . Sensors and Actuators A: Physical , 58 : 113
   Web of Science ®Google Scholar
• Perazzo , T. , Mao , M. , Kwon , O. , Majumdar , A. , Varesi , J.B. and Norton , P. 1999 . Infrared Vision Using Uncooled Micro–Optomechanical Camera . Applied Physics Letters , 74 : 3567
   Web of Science ®Google Scholar
• Grbovic , D. , Lavrik , N.V. , Datskos , P.G. , Forrai , D. , Nelson , E. , Devitt , J. and McIntyre , B. 2006 . Uncooled Infrared Imaging Using Bimaterial Microcantilever Arrays . Applied Physics Letters , 89 : 073118
   Google Scholar
• Hunter , S.R. , Amantea , R.A. , Goodman , L.A. , Kharas , D.B. , Gershtein , S. , Matey , J.R. , Perna , S.N. , Yu , Y. , Maley , N. and White , L.K. 2003 . High–Sensitivity Uncooled Microcantilever Infrared Imaging Arrays . Proceedings of SPIE , 5074 : 469
   Google Scholar
• Roark , R.J. and Young , W.C. 1975 . Formulas for Stress and Strain , 5th , New York : McGraw-Hill .
   Google Scholar
• Lee , J. , Wright , T.L. , Abel , M.R. , Sunden , E.O. , Marchenkov , A. , Graham , S. and King , W.P. 2007 . Thermal Conduction from Microcantilever Heaters in Partial Vacuum . Journal of Applied Physics , 101 : 014906
   Web of Science ®Google Scholar
• Kim , K.J. and King , W.P. 2009 . Thermal Conduction Between a Heated Microcantilever and a Surrounding Air Environment . Applied Thermal Engineering , 29 : 1631
   Web of Science ®Google Scholar
• Park , K. , Lee , J. , Zhang , Z.M.M. and King , W.P. 2007 . Frequency–Dependent Electrical and Thermal Response of Heated Atomic Force Microscope Cantilevers . Journal of Microelectomechanical Systems , 16 : 213
   Web of Science ®Google Scholar
• Djuric , Z. , Randjelovic , D. , Jokic , I. , Matovic , J. and Lamovec , J. 2007 . A New Approach to IR Bimaterial Detectors Theory . Infrared Physics & Technology , 50 : 51
   Google Scholar
• Butt , H.J. and Jaschke , M. 1995 . Calculation of Thermal Noise in Atomic Force Microscopy . Nanotechnology , 6 : 1
   Web of Science ®Google Scholar
• Sader , J.E. 1995 . Parallel Beam Approximation for V–Shaped Atomic Force Microscope Cantilevers . Review of Scientific Instruments , 66 : 4583
   Web of Science ®Google Scholar
• Incropera , F.P. and Dewitt , D.P. 2002 . Fundamentals of Heat and Mass Transfer , 5th , Hoboken, NJ : John Wiley & Sons .
   Google Scholar
• Wig , A. , Passian , A. , Arakawa , E. , Ferrell , T.L. and Thundat , T. 2004 . Optical Thin–Film Interference Effects in Microcantileve . Journal of Applied Physics , 95 : 1162
   Google Scholar
• Davis , B.J. , Carney , P.S. and Bhargava , R. 2010 . Theory of Mid-Infrared Absorption Microspectroscopy. I. Homogeneous Samples . Analytical Chemistry , 82 : 3474
   PubMed Web of Science ®Google Scholar
• Davis , B.J. , Carney , P.S. and Bhargava , R. 2010 . Theory of Mid-Infrared Absorption Microspectroscopy. II. Heterogeneous Samples . Analytical Chemistry , 82 : 3487
   PubMed Web of Science ®Google Scholar
• Brewster , M.Q. 1992 . Thermal Radiative Transfer and Properties , New York : Wiley Interscience .
   Google Scholar
• Datskos , P.G. , Oden , P.I. , Thundat , T. , Wachter , E.A. , Warmack , R.J. and Hunter , S.R. 1996 . Remote Infrared Radiation Detection Using Piezoresistive Microcantilevers . Applied Physics Letters , 69 : 2986
   Web of Science ®Google Scholar