Phonon Conduction in Periodically Porous Silicon Nanobridges

REFERENCES

• Balandin , A. 2011 . Thermal Properties of Graphene and Nanostructured Carbon Materials . Nature Materials , 10 : 569 – 581 .
   PubMed Web of Science ®Google Scholar
• Hicks , L.D. and Dresselhaus , M.S. 1993 . Thermoelectric Figure of Merit of a One-Dimensional Conductor . Physical Review B , 47 : 16631 – 16634 .
   PubMed Web of Science ®Google Scholar
• Wang , X.W. , Lee , H. , Lan , Y.C. , Zhu , G.H. , Joshi , G. , Wang , D.Z. , Yang , J. , Muto , A.J. , Tang , M.Y. , Klatsky , J. , Song , S. , Dresselhaus , M.S. , Chen , G. and Ren , Z.F. 2008 . Enhanced Thermoelectric Figure of Merit in Nanostructured N-Type Silicon Germanium Bulk Alloy . Applied Physics Letters , 93 : 193121 – 193123 .
   Web of Science ®Google Scholar
• Tang , J. , Wang , H.-T. , Lee , D.H. , Fardy , M. , Huo , Z. , Russell , T.P. and Yang , P. 2010 . Holey Silicon as an Efficient Thermoelectric Material . Nano Letters , 10 : 4279 – 4283 .
   PubMed Web of Science ®Google Scholar
• Hopkins , P.E. , Reinke , C.M. , Su , M.F. , Olsson , R.H. , Shaner , E.A. , Leseman , Z.C. , Serrano , J.R. , Phinney , L.M. and El-Kady , I. 2010 . Reduction in the Thermal Conductivity of Single Crystalline Silicon by Phononic Crystal Patterning . Nano Letters , 11 : 107 – 112 .
   Web of Science ®Google Scholar
• Song , D. and Chen , G. 2004 . Thermal Conductivity of Periodic Microporous Silicon Films . Applied Physics Letters , 84 : 687 – 689 .
   Web of Science ®Google Scholar
• Makarova , M. , Vuckovic , J. , Sanda , H. and Nishi , Y. Two-Dimensional Porous Silicon Photonic Crystal Light Emitters . 2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference . May , Long Beach . pp. 21 – 26 . CA
   Google Scholar
• Gong , Y. , Makarova , M. , Yerci , S. , Li , R. , Stevens , M.J. , Baek , B. , Nam , S.W. , Hadfield , R.H. , Dorenbos , S.N. , Zwiller , V. , Vuckovic , J. and Dal Negro , L. 2010 . Linewidth Narrowing and Purcell Enhancement in Photonic Crystal Cavitieson an Er-Doped Silicon Nitride Platform . Optics Express , 18 : 2601 – 2612 .
   Web of Science ®Google Scholar
• Esfarjani , K. , Chen , G. and Stokes , H.T. 2011 . Heat Transport in Silicon from First-Principles Calculations . Physical Review B , 84 : 085204-1–085204-11
   Google Scholar
• Benchabane , S. , Khelif , A. , Daniau , W. , Robert , L. , Petrini , V. , Assouar , B. , Vincent , B. , Elmazria , O. , Kruger , J. and Laude , V. 2005 . Silicon Phononic Crystal for Surface Acoustic Waves . 2005 IEEE Ultrasonics Symposium , Rotterdam, The Netherlands, 18-21 September
   Google Scholar
• Hopkins , P.E. , Phinney , L.M. , Rakich , P.T. , Olsson , R.H. and El-Kady , I. 2010 . Phonon Considerations in the Reduction of Thermal Conductivity in Phononic Crystals . Applied Physics A , 103 : 575 – 579 .
   Web of Science ®Google Scholar
• Lee , J.-H. , Galli , G.A. and Grossman , J.C. 2008 . Nanoporous Si as an Efficient Thermoelectric Material . Nano Letters , 8 : 3750 – 3754 .
   PubMed Web of Science ®Google Scholar
• Mohammadi , S. , Eftekhar , A.A. , Hunt , W.D. and Adibi , A. 2008 . Demonstration of Large Complete Phononic Band Gaps and Waveguiding in High-Frequency Silicon Phononic Crystal Slabs . 2008 IEEE International Frequency Control Symposium , Honolulu, HI, 19-21 May
   Google Scholar
• Olsson , R.H. III and El-Kady , I. 2009 . Microfabricated Phononic Crystal Devices and Applications . Measurement Science and Technology , 20 : 012002-1–012002-13
   Google Scholar
• Yu , J.-K. , Mitrovic , S. , Tham , D. , Varghese , J. and Heath , J.R. 2010 . Reduction of Thermal Conductivity in Phononic Nanomesh Structures . Nature Nanotechnology , 5 : 718 – 721 .
   PubMed Web of Science ®Google Scholar
• Gong , Y. , Ellis , B. , Shambat , G. , Sarmiento , T. , Harris , J.S. and Vuckovic , J. 2010 . Nanobeam Photonic Crystal Cavity Quantum Dot Laser . Optics Express , 18 : 8781 – 8789 .
   Web of Science ®Google Scholar
• Liu , W. and Asheghi , M. 2006 . Thermal Conductivity Measurements of Ultra-Thin Single Crystal Silicon Layers . Journal of Heat Transfer , 128 : 75 – 83 .
   Web of Science ®Google Scholar
• Liu , W. and Asheghi , M. 2005 . Thermal Conduction in Ultrathin Pure and Doped Single-Crystal Silicon Layers at High Temperatures . Journal of Applied Physics , 98 : 123523-1–123523-6
   Google Scholar
• Kodama , T. , Park , W. , Marconnet , A. , Lee , J. , Asheghi , M. and Goodson , K.E. In-Plane Thermal Conductivity Measurement on Nanoscale Conductive Materials with On-Substrate Device Configurations . IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITHERM) . May-1 June , San Diego . CA, 30
   Google Scholar
• Kim , B. , Nguyen , J. , Clews , P.J. , Reinke , C.M. , Goettler , D. , Leseman , Z.C. , El-Kady , I. and Olsson , R.H. Thermal Conductivity Manipulation in Single Crystal Silicon Via Lithographycally Defined Phononic Crystals . 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) . January-2 February , Paris, France . 29
   Google Scholar
• He , Y. , Donadio , D. , Lee , J.-H. , Grossman , J.C. and Galli , G. 2011 . Thermal Transport in Nanoporous Silicon: Interplay between Disorder at Mesoscopic and Atomic Scales . ACS Nano , 5 : 1839 – 1844 .
   PubMed Web of Science ®Google Scholar
• Hochbaum , A.I. , Chen , R. , Delgado , R.D. , Liang , W. , Garnett , E.C. , Najarian , M. , Majumdar , A. and Yang , P. 2008 . Enhanced Thermoelectric Performance of Rough Silicon Nanowires . Nature , 451 : 163 – 167 .
   PubMed Web of Science ®Google Scholar
• Oehrlein , G.S. 1989 . Dry Etching Damage of Silicon: A Review . Materials Science and Engineering: B , 4 : 441 – 450 .
   Web of Science ®Google Scholar
• Holland , M.G. 1963 . Analysis of Lattice Thermal Conductivity . Physical Review , 132 : 2461
   Web of Science ®Google Scholar
• Callaway , J. 1959 . Model for Lattice Thermal Conductivity at Low Temperatures . Physical Review , 113 : 1046 – 1051 .
   Web of Science ®Google Scholar
• Reinke , C.M. , Su , M.F. , Davis , B.L. , Kim , B. , Hussein , M.I. , Leseman , Z.C. , Olsson , R.H. III and El-Kady , I. 2011 . Thermal Conductivity Prediction of Nanoscale Phononic Crystal Slabs Using a Hybrid Lattice Dynamics–Continuum Mechanics Technique . AIP Advances , 1 : 041403 – 041414 .
   Google Scholar
• Weber , W. 1977 . Adiabatic Bond Charge Model for the Phonons in Diamond, Si, Ge, and A-Sn . Physical Review B , 15 : 4789 – 4803 .
   Web of Science ®Google Scholar
• Brockhouse , B.N. 1959 . Lattice Vibrations in Silicon and Germanium . Physical Review Letters , 2 : 256 – 258 .
   Web of Science ®Google Scholar
• Dames , C. and Chen , G. 2004 . Theoretical Phonon Thermal Conductivity of Si/Ge Superlattice Nanowires . Journal of Applied Physics , 95 : 682 – 693 .
   Web of Science ®Google Scholar
• Hopkins , P.E. , Rakich , P.T. , Olsson , R.H. , El-kady , I.F. and Phinney , L.M. 2009 . Origin of Reduction in Phonon Thermal Conductivity of Microporous Solids . Applied Physics Letters , 95 : 161902 – 161903 .
   Web of Science ®Google Scholar
• Casimir , H.B.G. 1938 . Note on the Conduction of Heat in Crystals . Physica , 5 : 495 – 500 .
   Google Scholar
• Sondheimer , E.H. 1952 . The Mean Free Path of Electrons in Metals . Advances in Physics , 1 : 1 – 42 .
   Web of Science ®Google Scholar
• Chambers , R.G. 1950 . The Conductivity of Thin Wires in a Magnetic Field . Proceedings of the Royal Society of London - Series A, Mathematical and Physical Sciences , 202 : 378 – 394 .
   Web of Science ®Google Scholar
• McGaughey , A. Phonon Transport in Thin Films . 7th U.S.–Japan Joint Seminar on Nanoscale Transport Phenomena—Science and Engineering . December , Shima, Japan . pp. 11 – 14 .
   Google Scholar
• McGaughey , A.J.H. and Jain , A. 2012 . Nanostructure Thermal Conductivity Prediction by Monte Carlo Sampling of Phonon Free Paths . Applied Physics Letters , 100 : 061911 – 061913 .
   Web of Science ®Google Scholar
• Gorishnyy , T. , Jang , J.-H. , Koh , C. and Thomas , E.L. 2007 . Direct Observation of a Hypersonic Band Gap in Two-Dimensional Single Crystalline Phononic Structures . Applied Physics Letters , 91 : 121915 – 121913 .
   Google Scholar
• Mohammadi , S. , Eftekhar , A.A. , Khelif , A. , Hunt , W.D. and Adibi , A. 2008 . Evidence of Large High Frequency Complete Phononic Band Gaps in Silicon Phononic Crystal Plates . Applied Physics Letters , 92 : 221905 – 221903 .
   Web of Science ®Google Scholar
• El-Kady , I. , Su , M.F. , Reinke , C.M. , Hopkins , P.E. , Goettler , D. , Leseman , Z.C. , Shaner , E.A. and Olsson , R.H. III . Manipulation of Thermal Phonons: A Phononic Crystal Route to High-Zt Thermoelectrics . Proceedings of the SPIE . pp. 794615 – 794619 . Vol. 7946
   Google Scholar
• Reinke , C.M. , Su , M.F. , Olsson , R.H. III and El-Kady , I. 2011 . Realization of Optimal Bandgaps in Solid–Solid, Solid–Air, and Hybrid Solid–Air–Solid Phononic Crystal Slabs . Applied Physics Letters , 98 : 061912 – 061913 .
   Google Scholar