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Original Articles

Fast and Flexible Non-Null Testing of Aspheres and Free-Form Surfaces with the Tilted-Wave-Interferometer

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REFERENCES

  • Braunecker , B. ; Hentschel , R. ; Tiziani , H.J. Advanced Optics Using Aspherical Elements . SPIE Press Monograph PM173 : Bellingham , WA , 2008 .
  • Schulz , G. Aspheric Surfaces in Progress in Optics ; Wolf , E. , Ed. Vol. XXV . North-Holland : Amsterdam , 1988 , pp. 349–415.
  • Kuechel , M.F. Interferometric measurement of rotationally symmetric aspheric surfaces . Proc. SPIE 7389/. 738916, 2009 .
  • Murphy , P. ; Forbes , G. ; Fleig , J. ; Dumas , P. ; Tricard , M. Stitching interferometry: A flexible solution for surface metrology . OPTPN 2003 , 14 , 38 – 43 .
  • Tricard , M. Subapertur-Stitching-Interferometrie: Messtechnik für die Asphären-Präzisionsfertigung . Photonik 2008 , 6 , 38 – 41 .
  • Liesener , J. Zum Einsatz räumlicher Lichtmodulatoren in der interferometrischen Wellenfrontmesstechnik. Dissertation Universität Stuttgart, 2006 .
  • Liesener , J. ; Garbusi , E. ; Pruss , C. ; Osten , W. Verfahren und Messvorrichtung zur Vermessung einer optisch glatten Oberfläche. German Patent 10 2006 057 606.3, 2006 .
  • Garbusi , E. ; Pruss , C. ; Osten , W. Interferometer for precise; and flexible asphere testing . Opt. Lett. 2008 , 33 , 2973 – 2975 .
  • Lowman , A.E. ; Greivenkamp , J.E. Interferometer errors due to the presence of fringes . Appl. Opt. 1996 , 35 , 6826 – 6828 .
  • Garbusi , E. ; Osten , W. Perturbation methods in optics: Application to the interferometric measurement of surfaces . J. Opt. Soc. Am. 2009 , 26 , 2538 – 2549 .
  • Baer , G. ; Schindler , J. ; Siepmann , J. ; Pruß , C. ; Osten , W. ; Schulz , M. Measurement of aspheres and free-form surfaces in a non-null test interferometer: Reconstruction of high-frequency errors. Proc. SPIE 8788 , 10.1117/12.2021518.
  • Baer , G. ; Garbusi , E. ; Lyda , W. ; Osten , W. Automated surface positioning for a non-null test interferometer . Opt. Eng. 2010 , 49 , 095602 .
  • Baer , G. ; Schindler , J. ; Pruss , C. ; Osten , W. Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces . JEOS 2013 , 8 , 13074 .
  • Color versions of one or more of the figures in the article can be found online at www.tandfonline.com/uopt.

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