Methods for Optical Shape Measurement and their Measurement Uncertainty

REFERENCES

• Dorsch , R. ; Häusler , G. ; Herrmann , J.M. Laser triangulation: fundamental uncertainty in distance measurement . Appl. Opt. 1994 , 33 , 1306 – 1314 .
   PubMed Web of Science ®Google Scholar
• Häusler , G. Verfahren und Vorrichtung zur Ermittlung der Form oder der Abbildungseigenschaften von spiegelnden oder transparenten Objekten . Patent DE 1999, 19944354 A1 .
   Google Scholar
• Häusler , G. Ubiquitous coherence: boon and bale of the optical metrologist . Proceedings of SPIE 2003 , 4933 , 48 – 52 .
   Google Scholar
• Knauer , M.C. ; Kaminski , J. ; Häusler , G. Phase measuring deflectometry: a new approach to measure specular free-form surfaces . Proceedings of SPIE 2004 , 5457 , 366 – 376 .
   Google Scholar
• Wiesner , B. ; Hýbl , O. ; Häusler , G. Improved white light interferometry on rough surfaces by statistically independent speckle patterns . Appl. Opt. 2012 , 51 , 751 – 757 .
   PubMed Web of Science ®Google Scholar
• Häusler , G. ; Ettl , S. Limitation of optical 3D sensors . In Optical Measurement of Surface Topography ; Leach , R. , Ed.; Springer : Berlin , 2011 .
   Google Scholar
• Rao , C.R. Linear Methods of Statistical Induction and their Applications . Wiley : New York , 1973 .
   Google Scholar
• Ritter , R. ; Hahn , R. Contribution to analysis of the reflection grating method . Opt. Las. Eng. 1983 , 4 , 13 – 24 .
   Web of Science ®Google Scholar
• Bothe , T. ; Li , W.S. ; von Kopylow , C. ; Jüptner , W. High Resolution 3D Shape Measurement on Specular Surfaces by Fringe Reflection . Proceedings of SPIE 2004 , 5457 , 411 – 422 .
   Google Scholar
• Su , P. ; Parks , R.E. ; Wang , L. ; Angel , R.P. ; Burge , J.H. Software configurable optical test system: a computerized reverse Hartmann test . Appl. Opt. 2010 , 49 , 4404 – 4412 .
   PubMed Web of Science ®Google Scholar
• Dresel , T. ; Häusler , G. ; Venzke , H. Three dimensional sensing of rough surfaces by coherence radar . Appl. Opt. 1992 , 31 , 919 – 925 .
   PubMed Web of Science ®Google Scholar
• Ronchi , V. Resolving power of calculated and detected images . J. Opt. Soc. Am. 1961 , 51 , 458 – 460 .
   Google Scholar
• Häusler , G. ; Ettl , P. ; Schenk , M. ; Bohn , G. ; Laszlo , I. Limits of optical range sensors and how to exploit them. Proceedings of International Trends in Optics and Photonics ICO IV 1999, 4, 328–342 .
   Google Scholar
• GUM. Guide to the Expression of Uncertainty in Measurement. http://www.bipm.org/en/publications/guides/gum.html (accessed Feb 12, 2014) .
   Google Scholar
• DIN 1319—Standard: Fundamentals of Metrology. Beuth: Berlin, 2005 .
   Google Scholar
• Albrecht , H.E. ; Borys , M. ; Damaschke , N. ; Tropea , C. Laser Doppler and Phase Doppler Measurement Techniques . Springer : New York , 2003 .
   Google Scholar
• Peřina , J. Quantum Statistics of Linear and Nonlinear Phenomena . Academic Publishers Dordrecht : Kluwer , 1991 .
   Google Scholar
• Falconi , O. Maximum sensitivities of optical direction and twist measuring instruments . J. Opt. Soc. Am. 1964 , 54 , 1315 – 1320 .
   Web of Science ®Google Scholar
• Sakurai , J.J. Modern Quantum Mechanics . Addison Wesley : Reading , MA , 1994.
   Google Scholar
• Barnett , S.M. ; Fabre , C. ; Maitre , A. Ultimate quantum limits for resolution of beam displacements . Eur. Phys. J. D. 2002 , 22 , 513 – 519 .
   Web of Science ®Google Scholar
• Walls , D.F. ; Milburn , G.J. Quantum Optics . Springer : Berlin , 1994 .
   Google Scholar
• Pavliček , P. Measurement uncertainty of optical methods for the measurement of the geometrical shape of objects . Proceedings of Fringe 2014 , 2013 , 411 – 416 .
   Google Scholar
• Putman , C.A.J. ; De Grooth , B.G. ; Van Hulst , N.F. ; Greve , J. A detailed analysis of the optical beam deflection technique for use in atomic force microscopy. J. Appl. Phys. 1992 , 72 , 6 – 12 .
   Web of Science ®Google Scholar
• Kino , G.S. ; Chim , S.S.C. Mirau correlation microscope . Appl. Opt. 1990 , 29 , 3775 – 83 .
   PubMed Web of Science ®Google Scholar
• Lee , B.S. ; Strand , T.C. Profilometry with a coherence scanning microscope . Appl. Opt. 1990 , 29 , 3784 – 3788 .
   PubMed Web of Science ®Google Scholar
• Dresel , T. Grundlagen und Grenzen der 3D-Datengewinnung mit dem Kohärenzradar. Master's thesis, Erlangen, 1991 .
   Google Scholar
• Ettl , P. ; Schmidt , B. ; Schenk , M. ; Laszlo , I. ; Häusler , G. Roughness parameters and surface deformation measured by “coherence radar” . Proceedings of SPIE 1998 , 3407 , 133 – 140 .
   Google Scholar
• Sheppard , C.J.R. ; Cogswell , C.J. Three-dimensional imaging in confocal microscopy . In Confocal Microscopy ; Wilson , T. , Ed.; Academic Press : San Diego , 1990 .
   Google Scholar
• Webb , R.H. Confocal optical microscopy . Rep. Prog. Phys. 1996 , 59 , 427 – 471 .
   Web of Science ®Google Scholar
• Ruprecht , A.K. ; Wiesendanger , T.F. ; Tiziani , H.J. Signal evaluation for high-speed confocal measurements . Appl. Opt. 2002 , 41 , 7410 – 7415 .
   PubMed Web of Science ®Google Scholar