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Review Article

Review of sensing and actuation technologies – from optical MEMS and nanophotonics to photonic nanosystems

Yiming Maa School of Microelectronics, Shanghai University, Shanghai, P. R. ChinaCorrespondence[email protected]
View further author information
,
Weixin Liub Department of Electrical and Computer Engineering, National University of Singapore, Singapore;c Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, SingaporeView further author information
,
Xinmiao Liub Department of Electrical and Computer Engineering, National University of Singapore, Singapore;c Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, SingaporeView further author information
,
Nan Wanga School of Microelectronics, Shanghai University, Shanghai, P. R. ChinaView further author information
&
Hui Zhangd Department of Electrical and Electronic Engineering, The Hong Kong Polytechnic University, Hong Kong, P. R. ChinaCorrespondence[email protected]
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Article: 2342279 | Published online: 07 May 2024

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